Research output per year
Research output per year
Search results
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2023
Remaining Useful Life Estimation of Lenses for an Ion Beam Etching Tool in Semiconductor Manufacturing Using Deep Convolutional Neural Networks
Wan, J. & McLoone, S., 20 Nov 2023, Electronics, Communications and Networks: Proceedings of the 13th International Conference (CECNet 2023), Macao, China, 17–20 November 2023. Tallón-Ballesteros, A. J., Cortés-Ancos, E. & López-García, D. A. (eds.). IOS, Vol. 381. p. 68 - 74 (Frontiers in Artificial Intelligence and Applications; vol. 381).Research output: Chapter in Book/Published conference output › Chapter
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