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• 2023

  Remaining Useful Life Estimation of Lenses for an Ion Beam Etching Tool in Semiconductor Manufacturing Using Deep Convolutional Neural Networks

  Wan, J. & McLoone, S., 20 Nov 2023, Electronics, Communications and Networks: Proceedings of the 13th International Conference (CECNet 2023), Macao, China, 17–20 November 2023. Tallón-Ballesteros, A. J., Cortés-Ancos, E. & López-García, D. A. (eds.). IOS, Vol. 381. p. 68 - 74 (Frontiers in Artificial Intelligence and Applications; vol. 381).

  Research output: Chapter in Book/Published conference output › Chapter

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  • Deep Convolutional Neural Network (deep CNN) 100%
  • Remaining Life Prediction 100%
  • Semiconductor Manufacturing 100%
  • Ion Beam Etching 100%
  • Convolutional Neural Network 100%