A high efficiency silicon nitride grating coupler

L. Vivien*, G. Maire, G. Sattler, D. Marris-Morini, E. Cassan, S. Laval, A. Kaźmierczak, D. Giannone, B. Sanchez, A. Griol, D. Hill, K. B. Gylfason, H. Sohlström

*Corresponding author for this work

Research output: Contribution to journalConference article

Abstract

The experimental demonstration of a high efficiency silicon nitride grating coupler is reported for wavelengths from λ = 1.25 to 1.45 μm for TE polarization. At the resonant angle, a coupling efficiency higher than 60% has been measured.

Original languageEnglish
Article number4347702
Pages (from-to)162-164
Number of pages3
JournalIEEE International Conference on Group IV Photonics GFP
DOIs
Publication statusPublished - 15 Oct 2007
Event2007 4th International Conference on Group IV Photonics, GFP 2007 -
Duration: 19 Sep 200721 Sep 2007

Keywords

  • Grating coupler
  • Microphotonics
  • Silicon nitride
  • Waveguide

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    Vivien, L., Maire, G., Sattler, G., Marris-Morini, D., Cassan, E., Laval, S., Kaźmierczak, A., Giannone, D., Sanchez, B., Griol, A., Hill, D., Gylfason, K. B., & Sohlström, H. (2007). A high efficiency silicon nitride grating coupler. IEEE International Conference on Group IV Photonics GFP, 162-164. [4347702]. https://doi.org/10.1109/GROUP4.2007.4347702