TY - JOUR
T1 - A Hybrid Vibration Powered Microelectromechanical Strain Gauge
AU - Jia, Yu
AU - Do, Cuong D.
AU - Zou, Xudong
AU - Seshia, Ashwin A
N1 - © 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
PY - 2015/9/16
Y1 - 2015/9/16
N2 - This paper reports the demonstration of an ultra-low-power micro-electromechanical system (MEMS)-CMOS oscillator for strain sensing, powered by a miniature piezoelectric vibration energy harvester (VEH). The employment of the Pierce oscillator topology in a MEMS-CMOS oscillator allows for the minimization of the power requirement to as low as 1.1 μW under ideal conditions. A VEH prototype, developed with hard lead zirconate titanate on a stainless steel substrate (∼0.4 -cm 3 practical operational volume), is able to deliver a typical average power of 187 μW at 11.4 ms−2 and 514 Hz. Some of the practical challenges associated with the integration of the harvester and the MEMS sensor have also been explored, which helps to lay the foundation for realizing net-zero-power strain sensors.
AB - This paper reports the demonstration of an ultra-low-power micro-electromechanical system (MEMS)-CMOS oscillator for strain sensing, powered by a miniature piezoelectric vibration energy harvester (VEH). The employment of the Pierce oscillator topology in a MEMS-CMOS oscillator allows for the minimization of the power requirement to as low as 1.1 μW under ideal conditions. A VEH prototype, developed with hard lead zirconate titanate on a stainless steel substrate (∼0.4 -cm 3 practical operational volume), is able to deliver a typical average power of 187 μW at 11.4 ms−2 and 514 Hz. Some of the practical challenges associated with the integration of the harvester and the MEMS sensor have also been explored, which helps to lay the foundation for realizing net-zero-power strain sensors.
UR - https://ieeexplore.ieee.org/document/7270276
U2 - 10.1109/JSEN.2015.2479295
DO - 10.1109/JSEN.2015.2479295
M3 - Article
SN - 1530-437X
VL - 16
SP - 235
EP - 241
JO - IEEE Sensors Journal
JF - IEEE Sensors Journal
IS - 1
ER -