A Hybrid Vibration Powered Microelectromechanical Strain Gauge

Yu Jia, Cuong D. Do, Xudong Zou, Ashwin A Seshia

Research output: Contribution to journalArticlepeer-review

Abstract

This paper reports the demonstration of an ultra-low-power micro-electromechanical system (MEMS)-CMOS oscillator for strain sensing, powered by a miniature piezoelectric vibration energy harvester (VEH). The employment of the Pierce oscillator topology in a MEMS-CMOS oscillator allows for the minimization of the power requirement to as low as 1.1 μW under ideal conditions. A VEH prototype, developed with hard lead zirconate titanate on a stainless steel substrate (∼0.4 -cm 3 practical operational volume), is able to deliver a typical average power of 187 μW at 11.4 ms−2 and 514 Hz. Some of the practical challenges associated with the integration of the harvester and the MEMS sensor have also been explored, which helps to lay the foundation for realizing net-zero-power strain sensors.
Original languageEnglish
Pages (from-to)235-241
JournalIEEE Sensors Journal
Volume16
Issue number1
DOIs
Publication statusPublished - 16 Sep 2015

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