A Nail-size Piezoelectric Energy Harvesting System Integrating a MEMS Transducer and a CMOS SSHI Circuit

Sijun Du, Yu Jia, Chun Zhao, Gehan A. J. Amaratunga, Ashwin A Seshia

Research output: Contribution to journalArticle

Abstract

Piezoelectric vibration energy harvesting has drawn much interest to power distributed wireless sensor nodes for Internet of Things (IoT) applications where ambient kinetic energy is available. For certain applications, the harvesting system should be small and able to generate sufficient output power. Standard rectification topologies such as the full-bridge rectifier are typically inefficient when adapted to power conditioning from miniaturized harvesters. Therefore, active rectification circuits have been researched to improve overall power conversion efficiency, and meet both the output power and miniaturization requirements while employing a MEMS harvester. In this paper, a MEMS piezoelectric energy harvester is designed and co-integrated with an active synchronized switch harvesting on inductor (SSHI) rectification circuit designed in a CMOS process to achieve high output power for system miniaturization. The system is fully integrated on a nail-size board, which is ready to provide a stable DC power for low-power mini sensors. A MEMS energy harvester of 0.005cm3 size, co-integrated with the CMOS conditioning circuit, outputs a peak rectified DC power of 40.6μ W and achieves a record DC power density of 8.12mW/cm3 when compared to state-of-the-art harvesters.
Original languageEnglish
JournalIEEE Sensors Journal
DOIs
Publication statusPublished - 12 Sep 2019

Fingerprint

Nails
Harvesters
Energy harvesting
inductors
microelectromechanical systems
MEMS
Transducers
CMOS
transducers
rectification
switches
Switches
Networks (circuits)
output
direct current
miniaturization
power conditioning
energy
rectifiers
sensors

Bibliographical note

© 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

Cite this

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title = "A Nail-size Piezoelectric Energy Harvesting System Integrating a MEMS Transducer and a CMOS SSHI Circuit",
abstract = "Piezoelectric vibration energy harvesting has drawn much interest to power distributed wireless sensor nodes for Internet of Things (IoT) applications where ambient kinetic energy is available. For certain applications, the harvesting system should be small and able to generate sufficient output power. Standard rectification topologies such as the full-bridge rectifier are typically inefficient when adapted to power conditioning from miniaturized harvesters. Therefore, active rectification circuits have been researched to improve overall power conversion efficiency, and meet both the output power and miniaturization requirements while employing a MEMS harvester. In this paper, a MEMS piezoelectric energy harvester is designed and co-integrated with an active synchronized switch harvesting on inductor (SSHI) rectification circuit designed in a CMOS process to achieve high output power for system miniaturization. The system is fully integrated on a nail-size board, which is ready to provide a stable DC power for low-power mini sensors. A MEMS energy harvester of 0.005cm3 size, co-integrated with the CMOS conditioning circuit, outputs a peak rectified DC power of 40.6μ W and achieves a record DC power density of 8.12mW/cm3 when compared to state-of-the-art harvesters.",
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A Nail-size Piezoelectric Energy Harvesting System Integrating a MEMS Transducer and a CMOS SSHI Circuit. / Du, Sijun; Jia, Yu; Zhao, Chun; Amaratunga, Gehan A. J.; Seshia, Ashwin A.

In: IEEE Sensors Journal, 12.09.2019.

Research output: Contribution to journalArticle

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