AFM oxidation of Ti for nanoscale IC applications

Daniel Hill*, Sascha Sadewasser, Xavier Aymerich

*Corresponding author for this work

Research output: Contribution to journalConference article

Abstract

Nanocapacitors are integral devices of nanoscale MOS based integrated circuits. They are yet to be realised and in this article we report our attempts to do so through the use of atomic force microscopy (AFM) anodic oxidation to isolate nano-sized squares of polysilicon, titanium and aluminium on Si/SiO 2. The focus of this work is on the conductive AFM performed topographical and electrical characterization of these structures.

Original languageEnglish
Pages (from-to)665-668
Number of pages4
JournalDesign and Nature
Volume6
Publication statusPublished - 17 Nov 2004
EventDesign and Nature II: Comparing Design in Nature with Science and Engineering - Rhodes, Greece
Duration: 28 Jun 200430 Jun 2004

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    Hill, D., Sadewasser, S., & Aymerich, X. (2004). AFM oxidation of Ti for nanoscale IC applications. Design and Nature, 6, 665-668.