Nanocapacitors are integral devices of nanoscale MOS based integrated circuits. They are yet to be realised and in this article we report our attempts to do so through the use of atomic force microscopy (AFM) anodic oxidation to isolate nano-sized squares of polysilicon, titanium and aluminium on Si/SiO 2. The focus of this work is on the conductive AFM performed topographical and electrical characterization of these structures.
|Number of pages||4|
|Journal||Design and Nature|
|Publication status||Published - 17 Nov 2004|
|Event||Design and Nature II: Comparing Design in Nature with Science and Engineering - Rhodes, Greece|
Duration: 28 Jun 2004 → 30 Jun 2004