AFM oxidation of Ti for nanoscale IC applications

Daniel Hill, Sascha Sadewasser, Xavier Aymerich

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Nanocapacitors are integral devices of nanoscale MOS based integrated circuits. They are yet to be realised and in this article we report our attempts to do so through the use of atomic force microscopy (AFM) anodic oxidation to isolate nano-sized squares of polysilicon, titanium and aluminium on Si/SiO2. The focus o f this work is on the conductive AFM performed topographical and electrical characterization of these structures.

Original languageEnglish
Title of host publicationMicroscopy of Semiconducting Materials 2003
PublisherCRC Press
Pages665-668
Number of pages4
ISBN (Electronic)9781351083089
ISBN (Print)0750309792, 9781315895536
DOIs
Publication statusPublished - 1 Jan 2003

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    Hill, D., Sadewasser, S., & Aymerich, X. (2003). AFM oxidation of Ti for nanoscale IC applications. In Microscopy of Semiconducting Materials 2003 (pp. 665-668). CRC Press. https://doi.org/10.1201/9781351074636