A sample oscillation module linked to a nanoindentation unit was used to perform nano-scale wear testing on a series of sputtered Cr doped amorphous C films deposited over a range of thicknesses (10, 20, 50, 150, and 2000 nm) under conditions relevant to MEMS and micro-scale engineering devices. A ruby sphere was used as the counter-body. Specific wear rates (defined as volume of worn material per unit applied load per unit of slid distance) were quantified and the effect of film thickness, applied load and test duration was investigated. Specific wear rate reduced exponentially with decreasing film thickness over the range of 10-2000 nm. The lowest wear rates were in the range of 0.1-6.1×10 -17m 3 N -1m -1. Specific wear rate reduced with increased applied load over the range of 0.1-10mN. The data scatter of replicated testing reduced along with the reduction of wear rate. A rapid reduction of specific wear rate was observed during the first 3000 oscillation cycles. This was analogous to the 'running in' process observed with macroscopic tribology systems.
- carbon-based coatings
- wear testing