While cantilever topologies offer high power responsiveness for MEMS vibration energy harvesting (VEH), they are less robust than multiply clamped or membrane topologies. This paper attempts to address this topological optimisation dilemma by attempting to achieve both high power density and robustness. The proposed umbrella-shaped topology constituents of a single central anchor while the membrane area extends outwards and is further enclosed by a ring of proof mass. Implemented on a 0.5 μm AlN on 10 μm doped Si process, a fabricated device (121 mm2 die area) recorded a peak power of 173 μW (1798 Hz and 0.56 g). The normalised power density compares favourably against the state-of-the-art cantilever piezoelectric MEMS VEH, while not sacrificing robustness. Furthermore, this device offers a broadband response, and it has experimentally demonstrated over 3 times higher band-limited noise induced power density than a cantilevered harvester fabricated using the same process.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 4 Dec 2019|
|Event||The 18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - Hilton Daytona Beach Oceanfront Resort, Daytona Beach, United States|
Duration: 4 Dec 2018 → 7 Dec 2018
Bibliographical noteContent from this work may be used under the terms of theCreative Commons Attribution 3.0 licence. Any further distribution
of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Published under licence by IOP Publishing Ltd
Funding: This research was supported by EPSRC (Grant EP/L010917/1).