An Umbrella-Shaped Topology for Broadband MEMS Piezoelectric Vibration Energy Harvesting

Keyphrases

• Band-limited Noise 50%
• Broadband Response 50%
• Cantilever 100%
• Die Area 50%
• Harvester 50%
• High Band 50%
• High Power 50%
• High Power Density 50%
• Induced Power 50%
• Membrane Area 50%
• Membrane Topology 50%
• MEMS piezoelectric 100%
• Noise Effects 50%
• Normalized Power Density 50%
• Peak Power 50%
• Piezoelectric MEMS 50%
• Piezoelectric Vibration Energy Harvesting 100%
• Power Density 50%
• Proof Mass 50%
• Si-doped 50%
• Topology Optimization 50%
• Umbrella-shaped 100%
• Vibration Energy Harvesting 100%

Engineering

• Energy Harvesting 100%
• Harvester 33%
• Induced Noise 33%
• Membrane Area 33%
• Microelectromechanical System 100%
• Peak Power 33%
• Piezoelectric 100%
• Power Density 100%
• Proof Mass 33%
• Responsiveness 33%