Ar rf plasma treatment of PET films for Si films adhesion improvement

I. A. Rusu; G. Popa; S. O. Saied; J. L. Sullivan

Ar rf plasma treatment of PET films for Si films adhesion improvement

I. A. Rusu^*, G. Popa, S. O. Saied, J. L. Sullivan

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

The main aim of these studies was to find the most effective methods to improve the adhesion between thin silicon films and polymer surfaces. The PET films surface modifications induced by treatments in argon rf discharge were investigated using XPS analysis, contact angle method and AFM analysis. An rf magnetron system was used to deposit the thin Si layer on PET samples. The peel-load test offered quantitative information related to the adhesion between silicon layer and polymer surfaces.

Original language	English
Pages (from-to)	1935-1938
Number of pages	4
Journal	Journal of Optoelectronics and Advanced Materials
Volume	8
Issue number	5
Publication status	Published - Oct 2006

Keywords

Adhesion
PET films
RF plasma
Si films

Cite this

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title = "Ar rf plasma treatment of PET films for Si films adhesion improvement",

abstract = "The main aim of these studies was to find the most effective methods to improve the adhesion between thin silicon films and polymer surfaces. The PET films surface modifications induced by treatments in argon rf discharge were investigated using XPS analysis, contact angle method and AFM analysis. An rf magnetron system was used to deposit the thin Si layer on PET samples. The peel-load test offered quantitative information related to the adhesion between silicon layer and polymer surfaces.",

keywords = "Adhesion, PET films, RF plasma, Si films",

author = "Rusu, {I. A.} and G. Popa and Saied, {S. O.} and Sullivan, {J. L.}",

year = "2006",

month = oct,

language = "English",

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pages = "1935--1938",

journal = "Journal of Optoelectronics and Advanced Materials",

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AU - Rusu, I. A.

AU - Popa, G.

AU - Saied, S. O.

AU - Sullivan, J. L.

PY - 2006/10

Y1 - 2006/10

N2 - The main aim of these studies was to find the most effective methods to improve the adhesion between thin silicon films and polymer surfaces. The PET films surface modifications induced by treatments in argon rf discharge were investigated using XPS analysis, contact angle method and AFM analysis. An rf magnetron system was used to deposit the thin Si layer on PET samples. The peel-load test offered quantitative information related to the adhesion between silicon layer and polymer surfaces.

AB - The main aim of these studies was to find the most effective methods to improve the adhesion between thin silicon films and polymer surfaces. The PET films surface modifications induced by treatments in argon rf discharge were investigated using XPS analysis, contact angle method and AFM analysis. An rf magnetron system was used to deposit the thin Si layer on PET samples. The peel-load test offered quantitative information related to the adhesion between silicon layer and polymer surfaces.

KW - Adhesion

KW - PET films

KW - RF plasma

KW - Si films

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M3 - Article

AN - SCOPUS:33750598920

SN - 1454-4164

VL - 8

SP - 1935

EP - 1938

JO - Journal of Optoelectronics and Advanced Materials

JF - Journal of Optoelectronics and Advanced Materials

IS - 5

ER -

Ar rf plasma treatment of PET films for Si films adhesion improvement

Abstract

Keywords

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