Ar rf plasma treatment of PET films for Si films adhesion improvement

I. A. Rusu*, G. Popa, S. O. Saied, J. L. Sullivan

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review


    The main aim of these studies was to find the most effective methods to improve the adhesion between thin silicon films and polymer surfaces. The PET films surface modifications induced by treatments in argon rf discharge were investigated using XPS analysis, contact angle method and AFM analysis. An rf magnetron system was used to deposit the thin Si layer on PET samples. The peel-load test offered quantitative information related to the adhesion between silicon layer and polymer surfaces.

    Original languageEnglish
    Pages (from-to)1935-1938
    Number of pages4
    JournalJournal of Optoelectronics and Advanced Materials
    Issue number5
    Publication statusPublished - Oct 2006


    • Adhesion
    • PET films
    • RF plasma
    • Si films


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