Comparative numerical study of energy deposition in femtosecond laser microfabrication with fundamental and second harmonics of Yb-doped laser

We present the results of comparative numerical study of femtosecond laser inscription for fundamental and second harmonic of Yb-doped laser. We have found that second harmonic is more efficient in terms of amount of absorbed energy which leads to lower inscription threshold. Hence this regime is more attractive for applications in femtosecond laser microfabrication. We observed the different size of modified domain on initial pulse energy and different spectrum dynamics during the pulse propagation for fundamental and second harmonics.