Abstract
A novel form of low coherence interferometric sensor is described. The channelled spectrum produced by illuminating a sensing interferometer with a broadband source is analysed directly using a CCD array. The system currently provides unambiguous measurement over a range of 1.5 mm with an accuracy of better than 6 µm.
| Original language | English |
|---|---|
| Pages (from-to) | 896-897 |
| Number of pages | 2 |
| Journal | Electronics letters |
| Volume | 29 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - 13 May 1993 |
Keywords
- laser diode source
- channelled spectrum
- linear CCD array
- low coherence interferometric sensor
- broadband source
- 1.5 mm