Effect of dopants on the fracture toughness of silicon

J.G. Swadener, M. Nastasi

Research output: Contribution to journalArticlepeer-review

Abstract

Fracture experiments were conducted on p-type and n-type Si in the presence and absence of hydrogen. It was found that fracture toughness is slightly less than the fracture toughness of n-type silicon. Annealing silicon in an Ar/H atmosphere gave a hydrogen concentration of less than 0.1 ppm, which did not have any measurable effect on fracture toughness. Likewise, the exposure of pre-cracked specimens to H did not cause any measurable change in fracture toughness.
Original languageEnglish
Pages (from-to)1363-1365
Number of pages3
JournalJournal of Materials Science letters
Volume21
Issue number17
DOIs
Publication statusPublished - Sep 2002

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