This paper presents a multi-order parametric resonant MEMS piezoelectric disk membrane, for the purpose of broadening the operational frequency bandwidth of a vibration energy harvester by employing the nonlinearity-induced bandwidth broadening associated with this phenomenon as well as the multi-frequency response associated with the higher orders. The fundamental mode -3dB bandwidth at 2.0 g recorded 55 Hz, while the first parametric resonant peak exhibited 365 Hz and the -3dB of the first 8 orders accumulated to 604 Hz. The membrane parametric resonator also experimentally demonstrated over 3-folds improvement in power density compared to a conventional direct resonator (cantilever), when subjected to band-limited white noise.
|Title of host publication||2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)|
|Publication status||Published - 29 Feb 2016|
|Event||IEEE 29th International Conference on Micro Electro Mechanical Systems - Shanghai, China|
Duration: 24 Jan 2016 → 28 Jan 2016
Conference number: 2016
|Conference||IEEE 29th International Conference on Micro Electro Mechanical Systems|
|Period||24/01/16 → 28/01/16|