Abstract
This paper presents a multi-order parametric resonant MEMS piezoelectric disk membrane, for the purpose of broadening the operational frequency bandwidth of a vibration energy harvester by employing the nonlinearity-induced bandwidth broadening associated with this phenomenon as well as the multi-frequency response associated with the higher orders. The fundamental mode -3dB bandwidth at 2.0 g recorded 55 Hz, while the first parametric resonant peak exhibited 365 Hz and the -3dB of the first 8 orders accumulated to 604 Hz. The membrane parametric resonator also experimentally demonstrated over 3-folds improvement in power density compared to a conventional direct resonator (cantilever), when subjected to band-limited white noise.
Original language | English |
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Title of host publication | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) |
Publisher | IEEE |
ISBN (Electronic) | 978-1-5090-1973-1 |
DOIs | |
Publication status | Published - 29 Feb 2016 |
Event | IEEE 29th International Conference on Micro Electro Mechanical Systems - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016 Conference number: 2016 |
Conference
Conference | IEEE 29th International Conference on Micro Electro Mechanical Systems |
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Abbreviated title | MEMS |
Country/Territory | China |
City | Shanghai |
Period | 24/01/16 → 28/01/16 |