This paper focuses on studying the effect of increasing the ambient temperature up to 160 °C on the power harvested by an MEMS piezoelectric micro-cantilever manufactured using an aluminum nitride-on-silicon fabrication process. An experimental study shows that the peak output power decreases by 60% to 70% depending on the input acceleration. A theoretical study establishes the relationship of all important parameters with temperature and includes them into a temperature-dependent model. This model shows that around 50% of the power drop can be explained by a decreasing quality factor, and that thermal stresses account for around 30% of this decrease.
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Arroyo, E., Jia, Y., Du, S., Chen, S-T., & Seshia, A. A. (2017). Experimental and theoretical study of a piezoelectric vibration energy harvester under high temperature. Journal of Microelectromechanical Systems, 26(6), 1216-1225. https://doi.org/10.1109/JMEMS.2017.2723626