Femtosecond laser-induced microstructures on diamond for microfluidic sensing device applications

Shi Su, Jiangling Li, Graham Lee, Kate Sugden, David Webb, Haitao Ye

Research output: Contribution to journalArticlepeer-review


This paper reported a three-dimensional microfluidic channel structure, which was fabricated by Yb:YAG 1026?nm femtosecond laser irradiation on a single-crystalline diamond substrate. The femtosecond laser irradiation energy level was optimized at 100?kHz repetition rate with a sub-500 femtosecond pulse duration. The morphology and topography of the microfluidic channel were characterized by a scanning electron microscope and an atomic force microscope. Raman spectroscopy indicated that the irradiated area was covered by graphitic materials. By comparing the cross-sectional profiles before/after removing the graphitic materials, it could be deduced that the microfluidic channel has an average depth of ~410?nm with periodical ripples perpendicular to the irradiation direction. This work proves the feasibility of using ultra-fast laser inscription technology to fabricate microfluidic channels on biocompatible diamond substrates, which offers a great potential for biomedical sensing applications.
Original languageEnglish
Article number231913
Pages (from-to)231913
Number of pages5
JournalApplied Physics Letters
Issue number23
Publication statusPublished - 2013

Bibliographical note

Copyright 2013 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
The following article appeared in Su, S., Li, J., Lee, G., Sugden, K., Webb, D., & Ye, H. (2013). Femtosecond laser-induced microstructures on diamond for microfluidic sensing devices applications. Applied physics letters, 102(23), [231913] and may be found at http://link.aip.org/link/?apl/102/231913

The authors want to acknowledge the funding for this study provided by the Engineering and Physical Sciences Research Council (EPSRC: EP/H034269/1).


  • atomic force microscopy
  • surface topography
  • surface morphology
  • scanning electron microscopy
  • Raman spectra
  • microfluidics
  • microfabrication
  • laser beam effects
  • high-speed optical techniques
  • crystal microstructure
  • diamond


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