Femtosecond laser microfabrication of subwavelength structures in photonics

Vladimir Mezentsev; Jovana Petrovic; Mykhaylo Dubov; Ian Bennion; Jürgen Dreher; Holger Schmitz; Rainer Grauer

doi:10.1117/12.705800

Femtosecond laser microfabrication of subwavelength structures in photonics

Vladimir Mezentsev, Jovana Petrovic, Mykhaylo Dubov, Ian Bennion, Jürgen Dreher, Holger Schmitz, Rainer Grauer

Aston Institute of Photonic Technologies (AiPT)

Research output: Chapter in Book/Published conference output › Conference publication

29 Citations (Scopus)

128 Downloads (Pure)

Abstract

This paper describes experimental and numerical results of the plasma-assisted microfabrication of subwavelength structures by means of point-by point femtosecond laser inscription. It is shown that the spatio-temporal evolution of light and plasma patterns critically depend on input power. Subwavelength inscription corresponds to the supercritical propagation regimes when pulse power is several times self-focusing threshold. Experimental and numerical profiles show quantitative agreement.

Original language	English
Title of host publication	Laser-based micro- and nanopackaging and assembly
Editors	Wilhelm Pfleging, Yongfeng Lu, Kunihiko Washio, Friedrich G. Bachmann, Willem Hoving
Publisher	Society of Photo-Optical Instrumentation Engineers (SPIE)
Number of pages	11
Volume	6459
ISBN (Print)	978-0-8194-6572-6
DOIs	https://doi.org/10.1117/12.705800
Publication status	Published - 13 Mar 2007
Event	Laser-based micro- and nanopackaging and assembly - San Jose, CA, United States Duration: 22 Jan 2007 → 24 Jan 2007

Publication series

Name	SPIE proceedings
Publisher	SPIE
Volume	6459
ISSN (Print)	0277-786X

Conference

Conference	Laser-based micro- and nanopackaging and assembly
Country/Territory	United States
City	San Jose, CA
Period	22/01/07 → 24/01/07

Bibliographical note

Vladimir Mezentsev ; Jovana S. Petrovic ; Mykhaylo Dubov ; Ian Bennion ; Jürgen Dreher ; Holger Schmitz and Rainer Grauer, "Femtosecond laser microfabrication of subwavelength structures in photonics", Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590B (March 13, 2007); doi:10.1117/12.705800.

Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

http://dx.doi.org/10.1117/12.705800

Keywords

light propagation
photonic devices
photonics
ultrashort pulses
femtosecond laser inscription
self-focusing threshold
subwavelength structures

Access to Document

10.1117/12.705800

Femtosecond laser microfabrication(2007)
Vladimir Mezentsev ; Jovana S. Petrovic ; Mykhaylo Dubov ; Ian Bennion ; Jürgen Dreher ; Holger Schmitz and Rainer Grauer, "Femtosecond laser microfabrication of subwavelength structures in photonics", Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590B (March 13, 2007); doi:10.1117/12.705800. Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Final published version, 864 KB

Cite this

Mezentsev, V., Petrovic, J., Dubov, M., Bennion, I., Dreher, J., Schmitz, H., & Grauer, R. (2007). Femtosecond laser microfabrication of subwavelength structures in photonics. In W. Pfleging, Y. Lu, K. Washio, F. G. Bachmann, & W. Hoving (Eds.), Laser-based micro- and nanopackaging and assembly (Vol. 6459). Article 64590B (SPIE proceedings; Vol. 6459). Society of Photo-Optical Instrumentation Engineers (SPIE). https://doi.org/10.1117/12.705800

Mezentsev, Vladimir ; Petrovic, Jovana ; Dubov, Mykhaylo et al. / Femtosecond laser microfabrication of subwavelength structures in photonics. Laser-based micro- and nanopackaging and assembly. editor / Wilhelm Pfleging ; Yongfeng Lu ; Kunihiko Washio ; Friedrich G. Bachmann ; Willem Hoving. Vol. 6459 Society of Photo-Optical Instrumentation Engineers (SPIE), 2007. (SPIE proceedings).

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abstract = "This paper describes experimental and numerical results of the plasma-assisted microfabrication of subwavelength structures by means of point-by point femtosecond laser inscription. It is shown that the spatio-temporal evolution of light and plasma patterns critically depend on input power. Subwavelength inscription corresponds to the supercritical propagation regimes when pulse power is several times self-focusing threshold. Experimental and numerical profiles show quantitative agreement.",

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Mezentsev, V, Petrovic, J, Dubov, M, Bennion, I, Dreher, J, Schmitz, H & Grauer, R 2007, Femtosecond laser microfabrication of subwavelength structures in photonics. in W Pfleging, Y Lu, K Washio, FG Bachmann & W Hoving (eds), Laser-based micro- and nanopackaging and assembly. vol. 6459, 64590B, SPIE proceedings, vol. 6459, Society of Photo-Optical Instrumentation Engineers (SPIE), Laser-based micro- and nanopackaging and assembly, San Jose, CA, United States, 22/01/07. https://doi.org/10.1117/12.705800

Femtosecond laser microfabrication of subwavelength structures in photonics. / Mezentsev, Vladimir; Petrovic, Jovana; Dubov, Mykhaylo et al.
Laser-based micro- and nanopackaging and assembly. ed. / Wilhelm Pfleging; Yongfeng Lu; Kunihiko Washio; Friedrich G. Bachmann; Willem Hoving. Vol. 6459 Society of Photo-Optical Instrumentation Engineers (SPIE), 2007. 64590B (SPIE proceedings; Vol. 6459).

Research output: Chapter in Book/Published conference output › Conference publication

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T1 - Femtosecond laser microfabrication of subwavelength structures in photonics

AU - Mezentsev, Vladimir

AU - Petrovic, Jovana

AU - Dubov, Mykhaylo

AU - Bennion, Ian

AU - Dreher, Jürgen

AU - Schmitz, Holger

AU - Grauer, Rainer

N1 - Vladimir Mezentsev ; Jovana S. Petrovic ; Mykhaylo Dubov ; Ian Bennion ; Jürgen Dreher ; Holger Schmitz and Rainer Grauer, "Femtosecond laser microfabrication of subwavelength structures in photonics", Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590B (March 13, 2007); doi:10.1117/12.705800. Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. http://dx.doi.org/10.1117/12.705800

PY - 2007/3/13

Y1 - 2007/3/13

N2 - This paper describes experimental and numerical results of the plasma-assisted microfabrication of subwavelength structures by means of point-by point femtosecond laser inscription. It is shown that the spatio-temporal evolution of light and plasma patterns critically depend on input power. Subwavelength inscription corresponds to the supercritical propagation regimes when pulse power is several times self-focusing threshold. Experimental and numerical profiles show quantitative agreement.

AB - This paper describes experimental and numerical results of the plasma-assisted microfabrication of subwavelength structures by means of point-by point femtosecond laser inscription. It is shown that the spatio-temporal evolution of light and plasma patterns critically depend on input power. Subwavelength inscription corresponds to the supercritical propagation regimes when pulse power is several times self-focusing threshold. Experimental and numerical profiles show quantitative agreement.

KW - light propagation

KW - photonic devices

KW - photonics

KW - ultrashort pulses

KW - femtosecond laser inscription

KW - self-focusing threshold

KW - subwavelength structures

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DO - 10.1117/12.705800

M3 - Conference publication

SN - 978-0-8194-6572-6

VL - 6459

T3 - SPIE proceedings

BT - Laser-based micro- and nanopackaging and assembly

A2 - Pfleging, Wilhelm

A2 - Lu, Yongfeng

A2 - Washio, Kunihiko

A2 - Bachmann, Friedrich G.

A2 - Hoving, Willem

PB - Society of Photo-Optical Instrumentation Engineers (SPIE)

T2 - Laser-based micro- and nanopackaging and assembly

Y2 - 22 January 2007 through 24 January 2007

ER -

Mezentsev V, Petrovic J, Dubov M, Bennion I, Dreher J, Schmitz H et al. Femtosecond laser microfabrication of subwavelength structures in photonics. In Pfleging W, Lu Y, Washio K, Bachmann FG, Hoving W, editors, Laser-based micro- and nanopackaging and assembly. Vol. 6459. Society of Photo-Optical Instrumentation Engineers (SPIE). 2007. 64590B. (SPIE proceedings). doi: 10.1117/12.705800

Femtosecond laser microfabrication of subwavelength structures in photonics

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Bibliographical note

Keywords

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