The development of a fiber extrinsic Fabry-Perot interferometer for measuring vibration amplitude and resonances of piezoelectric elements is reported. The signal demodulation method based on the use of an optical spectrum analyzer allows the measurement of displacements and resonances with high resolution. The technique consists basically in monitoring changes in the intensity or the wavelength of a single interferometric fringe at a point of high sensitivity in the sensor response curve. For sensor calibration, three signal processing techniques were employed. Vibration amplitude measurement with 0.84 nm/V sensitivity and the characterization of the piezo resonance is demonstrated.
|Journal||Proceedings of SPIE - International Society for Optical Engineering|
|Publication status||Published - 17 May 2011|