Fully controllable silicon nanowire fabricated using optical lithography and orientation dependent oxidation

Engineering & Materials Science

• Photolithography 100%
• Nanowires 98%
• Oxidation 70%
• Silicon 62%
• Controllability 27%
• Fabrication 19%
• Nanoelectronics 18%
• Optical properties 16%
• Nanostructures 16%
• Costs 15%
• Etching 14%
• Field effect transistors 14%
• Electric properties 14%
• Crystalline materials 13%
• Thermodynamic properties 12%
• Aspect ratio 12%
• Metals 8%

Physics & Astronomy

• lithography 66%
• nanowires 64%
• oxidation 58%
• silicon 42%
• controllability 31%
• fabrication 16%
• aspect ratio 12%
• CMOS 11%
• routes 11%
• thermodynamic properties 10%
• field effect transistors 10%
• etching 10%
• electrical properties 9%
• optical properties 8%
• metals 6%

Chemistry

• Nanowire 69%
• Oxidation Reaction 35%
• Length 15%
• Thermoelectricity 14%
• Application 12%
• Etching 11%
• Electrical Property 11%
• Optical Property 9%
• Nanomaterial 8%
• Reaction Yield 5%