TY - JOUR
T1 - High efficiency silicon nitride surface grating couplers
AU - Maire, Guillaume
AU - Vivien, Laurent
AU - Sattler, Guillaume
AU - Kaźmierczak, Andrzej
AU - Sanchez, Benito
AU - Gylfason, Kristinn B.
AU - Griol, Amadeu
AU - Marris-Morini, Delphine
AU - Cassan, Eric
AU - Giannone, Domenico
AU - Sohlström, Hans
AU - Hill, Daniel
N1 - ©2008 Optical Society of America. This is an open access article according to the OSA Publishing guidelines https://www.osapublishing.org/submit/review/open-access-policy-statement.cfm
PY - 2008/1/7
Y1 - 2008/1/7
N2 - High efficiency surface grating couplers for silicon nitride waveguides have been designed, fabricated, and characterized. Coupling efficiencies exceeding 60 % are reported at a wavelength of 1.31 μm, as well as angular and wavelength -3 dB tolerances of 4° and 50 nm, respectively. When the wavelength is increased from 1310 nm to 1450 nm the coupling efficiency progressively decreases but remains above 20 % at 1450 nm. The influence of the duty ratio of the grating has also been investigated: maximum coupling efficiency was obtained at 50 % duty ratio.
AB - High efficiency surface grating couplers for silicon nitride waveguides have been designed, fabricated, and characterized. Coupling efficiencies exceeding 60 % are reported at a wavelength of 1.31 μm, as well as angular and wavelength -3 dB tolerances of 4° and 50 nm, respectively. When the wavelength is increased from 1310 nm to 1450 nm the coupling efficiency progressively decreases but remains above 20 % at 1450 nm. The influence of the duty ratio of the grating has also been investigated: maximum coupling efficiency was obtained at 50 % duty ratio.
UR - http://www.scopus.com/inward/record.url?scp=38049178733&partnerID=8YFLogxK
UR - https://www.osapublishing.org/oe/abstract.cfm?uri=oe-16-1-328
U2 - 10.1364/OE.16.000328
DO - 10.1364/OE.16.000328
M3 - Article
C2 - 18521164
AN - SCOPUS:38049178733
SN - 1094-4087
VL - 16
SP - 328
EP - 333
JO - Optics Express
JF - Optics Express
IS - 1
ER -