High efficiency silicon nitride surface grating couplers

Guillaume Maire*, Laurent Vivien, Guillaume Sattler, Andrzej Kaźmierczak, Benito Sanchez, Kristinn B. Gylfason, Amadeu Griol, Delphine Marris-Morini, Eric Cassan, Domenico Giannone, Hans Sohlström, Daniel Hill

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


High efficiency surface grating couplers for silicon nitride waveguides have been designed, fabricated, and characterized. Coupling efficiencies exceeding 60 % are reported at a wavelength of 1.31 μm, as well as angular and wavelength -3 dB tolerances of 4° and 50 nm, respectively. When the wavelength is increased from 1310 nm to 1450 nm the coupling efficiency progressively decreases but remains above 20 % at 1450 nm. The influence of the duty ratio of the grating has also been investigated: maximum coupling efficiency was obtained at 50 % duty ratio.

Original languageEnglish
Pages (from-to)328-333
Number of pages6
JournalOptics Express
Issue number1
Publication statusPublished - 7 Jan 2008

Bibliographical note

©2008 Optical Society of America. This is an open access article according to the OSA Publishing guidelines https://www.osapublishing.org/submit/review/open-access-policy-statement.cfm


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