Abstract
Nanostructured crystalline titanium dioxide (TiO2) finds applications in numerous fields such as photocatalysis or photovoltaics where its physical and chemical properties depend on its shape and crystallinity. We report a simple method of fabricating TiO2 nanowires by selective area deposition of titanium tetraisopropoxide (TTIP) and water in a CVD-based approach at low temperature by utilizing PS-b-PEO self-assembled block copolymer thin film as a template. Parameters such as exposure time to TTIP (minutes to hours), working temperature (~18 to 40 °C) and relative humidity (20 to 70 RH%) were systemically investigated through GISAXS, SEM and XPS and optimized for fabrication of TiO2 nanostructures. The resulting processing conditions yielded titanium dioxide nanowires with a diameter of 24 nm. An extra calcination step (400 – 700 °C) was introduced to burn off the remaining organic matrix and introduce phase change from amorphous to anatase in TiO2 nanowires without any loss in order.
Original language | English |
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Pages (from-to) | 3426–3434 |
Number of pages | 9 |
Journal | ACS Applied Nano Materials |
Volume | 1 |
Issue number | 7 |
Early online date | 18 Jun 2018 |
DOIs | |
Publication status | Published - 27 Jul 2018 |