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Initial nucleation study and new technique for sublimation growth of AlN on SiC substrate

  • Y. Shi
  • , B. Liu
  • , L. Liu
  • , H.M. Meyer III
  • , E.A. Payzant
  • , L.R. Walker
  • , N.D. Evans
  • , Greg Swadener
  • , J. Chaudhuri
  • , Joy Chaudhuri
  • Kansas State University
  • Oak Ridge National Laboratory
  • Wichita State University

Research output: Contribution to journalArticlepeer-review

Abstract

Single crystal platelets of AlN were successfully grown on 6H-SiC(0001) by a novel technique designed to suppress SiC decomposition, promote two-dimensional growth, and eliminate cracking in the AlN. X-ray diffractometry and synchrotron white beam X-ray topography demonstrate that the final AlN single crystal is of high structural quality.
Original languageEnglish
Pages (from-to)757-762
Number of pages6
JournalPhysica Status Solidi A
Volume188
Issue number2
Early online date23 Nov 2001
DOIs
Publication statusPublished - Dec 2001

Keywords

  • 61.10.Nz
  • 68.37.Hk
  • Hk; 68.37.Ps
  • 81.05.Ea
  • 81.15.Gh
  • S7.14

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