Large scale fabrication of nitrogen vacancy-embedded diamond nanostructures for single-photon source applications

Qianqing Jiang, Wuxia Li*, Chengchun Tang, Yanchun Chang, Tingting Hao, Xinyu Pan, Haitao Ye, Junjie Li, Changzhi Gu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Some color centers in diamond can serve as quantum bits which can be manipulated with microwave pulses and read out with laser, even at room temperature. However, the photon collection efficiency of bulk diamond is greatly reduced by refraction at the diamond/air interface. To address this issue, we fabricated arrays of diamond nanostructures, differing in both diameter and top end shape, with HSQ and Cr as the etching mask materials, aiming toward large scale fabrication of single-photon sources with enhanced collection efficiency made of nitrogen vacancy (NV) embedded diamond. With a mixture of O2 and CHF3 gas plasma, diamond pillars with diameters down to 45 nm were obtained. The top end shape evolution has been represented with a simple model. The tests of size dependent single-photon properties confirmed an improved single-photon collection efficiency enhancement, larger than tenfold, and a mild decrease of decoherence time with decreasing pillar diameter was observed as expected. These results provide useful information for future applications of nanostructured diamond as a single-photon source.

Original languageEnglish
Article number118105
JournalChinese Physics B
Volume25
Issue number11
Early online date30 Sep 2016
DOIs
Publication statusPublished - Nov 2016

Bibliographical note

© IOP

Keywords

  • diamond
  • large scale fabrication
  • nitrogen vacancy
  • single-photon source

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