We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.
|Title of host publication||CLEO/QELS: 2010 Laser Science to Photonic Applications|
|Publication status||Published - 1 Jul 2010|
|Event||CLEO/QELS: 2010 Laser Science to Photonic Applications - San Jose, United States|
Duration: 16 May 2010 → 21 May 2010
|Conference||CLEO/QELS: 2010 Laser Science to Photonic Applications|
|Period||16/05/10 → 21/05/10|