Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics

M. M. Halim, A. Abdolvand, Y. Fan, S. K. Persheyev, C. Main, E. U. Rafailov, M. J. Rose, IEEE

Research output: Chapter in Book/Published conference outputConference publication

Abstract

We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.
Original languageEnglish
Title of host publicationCLEO/QELS: 2010 Laser Science to Photonic Applications
PublisherIEEE
DOIs
Publication statusPublished - 1 Jul 2010
EventCLEO/QELS: 2010 Laser Science to Photonic Applications - San Jose, United States
Duration: 16 May 201021 May 2010

Conference

ConferenceCLEO/QELS: 2010 Laser Science to Photonic Applications
Country/TerritoryUnited States
CitySan Jose
Period16/05/1021/05/10

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