Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics

M. M. Halim; A. Abdolvand; Y. Fan; S. K. Persheyev; C. Main; E. U. Rafailov; M. J. Rose; IEEE

doi:10.1364/CLEO.2010.JTuD17

Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics

M. M. Halim, A. Abdolvand, Y. Fan, S. K. Persheyev, C. Main, E. U. Rafailov, M. J. Rose, IEEE

Aston Institute of Photonic Technologies (AiPT)

Research output: Chapter in Book/Published conference output › Conference publication

Abstract

We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.

Original language	English
Title of host publication	CLEO/QELS: 2010 Laser Science to Photonic Applications
Publisher	IEEE
DOIs	https://doi.org/10.1364/CLEO.2010.JTuD17
Publication status	Published - 1 Jul 2010
Event	CLEO/QELS: 2010 Laser Science to Photonic Applications - San Jose, United States Duration: 16 May 2010 → 21 May 2010

Conference

Conference	CLEO/QELS: 2010 Laser Science to Photonic Applications
Country/Territory	United States
City	San Jose
Period	16/05/10 → 21/05/10

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10.1364/CLEO.2010.JTuD17

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@inproceedings{ac49745b619c454dbcae4df4dc38a6ff,

title = "Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics",

abstract = "We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.",

author = "Halim, {M. M.} and A. Abdolvand and Y. Fan and Persheyev, {S. K.} and C. Main and Rafailov, {E. U.} and Rose, {M. J.} and IEEE",

year = "2010",

month = jul,

day = "1",

doi = "10.1364/CLEO.2010.JTuD17",

language = "English",

booktitle = "CLEO/QELS: 2010 Laser Science to Photonic Applications",

publisher = "IEEE",

address = "United States",

note = "CLEO/QELS: 2010 Laser Science to Photonic Applications ; Conference date: 16-05-2010 Through 21-05-2010",

}

Halim, MM, Abdolvand, A, Fan, Y, Persheyev, SK, Main, C, Rafailov, EU, Rose, MJ & IEEE 2010, Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics. in CLEO/QELS: 2010 Laser Science to Photonic Applications. IEEE, CLEO/QELS: 2010 Laser Science to Photonic Applications, San Jose, California, United States, 16/05/10. https://doi.org/10.1364/CLEO.2010.JTuD17

TY - GEN

T1 - Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics

AU - Halim, M. M.

AU - Abdolvand, A.

AU - Fan, Y.

AU - Persheyev, S. K.

AU - Main, C.

AU - Rafailov, E. U.

AU - Rose, M. J.

AU - IEEE,

PY - 2010/7/1

Y1 - 2010/7/1

N2 - We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.

AB - We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.

UR - http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000290513602282&KeyUID=WOS:000290513602282

UR - https://ieeexplore.ieee.org/abstract/document/5499681

U2 - 10.1364/CLEO.2010.JTuD17

DO - 10.1364/CLEO.2010.JTuD17

M3 - Conference publication

BT - CLEO/QELS: 2010 Laser Science to Photonic Applications

PB - IEEE

T2 - CLEO/QELS: 2010 Laser Science to Photonic Applications

Y2 - 16 May 2010 through 21 May 2010

ER -

Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics

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