Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics

M. M. Halim; A. Abdolvand; Y. Fan; S. K. Persheyev; C. Main; E. U. Rafailov; M. J. Rose; IEEE

doi:10.1364/CLEO.2010.JTuD17

Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics

M. M. Halim
, A. Abdolvand
, Y. Fan
, S. K. Persheyev
, C. Main
, E. U. Rafailov
, M. J. Rose
, IEEE

Aston Institute of Photonic Technologies (AiPT)

Research output: Chapter in Book/Published conference output › Conference publication

Abstract

We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.

Original language	English
Title of host publication	CLEO/QELS: 2010 Laser Science to Photonic Applications
Publisher	IEEE
DOIs	https://doi.org/10.1364/CLEO.2010.JTuD17
Publication status	Published - 1 Jul 2010
Event	CLEO/QELS: 2010 Laser Science to Photonic Applications - San Jose, United States Duration: 16 May 2010 → 21 May 2010

Conference

Conference	CLEO/QELS: 2010 Laser Science to Photonic Applications
Country/Territory	United States
City	San Jose
Period	16/05/10 → 21/05/10

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10.1364/CLEO.2010.JTuD17

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@inproceedings{ac49745b619c454dbcae4df4dc38a6ff,

title = "Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics",

abstract = "We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.",

author = "Halim, \{M. M.\} and A. Abdolvand and Y. Fan and Persheyev, \{S. K.\} and C. Main and Rafailov, \{E. U.\} and Rose, \{M. J.\} and IEEE",

year = "2010",

month = jul,

day = "1",

doi = "10.1364/CLEO.2010.JTuD17",

language = "English",

booktitle = "CLEO/QELS: 2010 Laser Science to Photonic Applications",

publisher = "IEEE",

address = "United States",

note = "CLEO/QELS: 2010 Laser Science to Photonic Applications ; Conference date: 16-05-2010 Through 21-05-2010",

}

Halim, MM, Abdolvand, A, Fan, Y, Persheyev, SK, Main, C, Rafailov, EU, Rose, MJ & IEEE 2010, Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics. in CLEO/QELS: 2010 Laser Science to Photonic Applications. IEEE, CLEO/QELS: 2010 Laser Science to Photonic Applications, San Jose, California, United States, 16/05/10. https://doi.org/10.1364/CLEO.2010.JTuD17

TY - GEN

T1 - Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics

AU - Halim, M. M.

AU - Abdolvand, A.

AU - Fan, Y.

AU - Persheyev, S. K.

AU - Main, C.

AU - Rafailov, E. U.

AU - Rose, M. J.

AU - IEEE,

PY - 2010/7/1

Y1 - 2010/7/1

N2 - We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.

AB - We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.

UR - http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000290513602282&KeyUID=WOS:000290513602282

UR - https://ieeexplore.ieee.org/abstract/document/5499681

U2 - 10.1364/CLEO.2010.JTuD17

DO - 10.1364/CLEO.2010.JTuD17

M3 - Conference publication

BT - CLEO/QELS: 2010 Laser Science to Photonic Applications

PB - IEEE

T2 - CLEO/QELS: 2010 Laser Science to Photonic Applications

Y2 - 16 May 2010 through 21 May 2010

ER -

Laser Assisted Microstructuring of Amorphous Silicon for Microelectronics

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