MEMS Piezoelectric Energy Harvester Powered Wireless Sensor Module Driven by Noisy Base Excitation

Sijun Du; Yu Jia; Emmanuelle Arroyo; S. Fernandez; S. T. Riches; Ashwin A Seshia

doi:10.1109/TRANSDUCERS.2019.8808556

MEMS Piezoelectric Energy Harvester Powered Wireless Sensor Module Driven by Noisy Base Excitation

Sijun Du, Yu Jia, Emmanuelle Arroyo, S. Fernandez, S. T. Riches, Ashwin A Seshia

Research output: Chapter in Book/Published conference output › Conference publication

Abstract

Despite recent advances in MEMS vibration energy harvesting and ultra-low power wireless sensors, designing a wireless sensor system entirely powered by a single MEMS device under noisy base excitation has remained a challenge. This paper presents a wireless sensor system co-integrated with a single MEMS piezoelectric vibration energy harvester chip excited by band-limited large amplitude noisy vibration characteristic of an automotive application. The use of soft stoppers in the MEMS package enables the harvesters to operate at an excitation level of 10 g(rms). A custom thick AlN (Aluminum Nitride) piezoelectric process is employed to fabricate the MEMS harvesters with a single MEMS chip generating 179 μW rectified power under these excitation conditions. A low-power wireless sensor module and a receiver module were also designed and demonstrated in this work. Experiments show that the wireless sensor module can be powered solely by the MEMS energy harvester commencing from the cold state. Successful wireless data transmission and receival of sensor data packets are recorded under representative conditions.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	IEEE
Pages	350-353
Number of pages	4
ISBN (Electronic)	9781728120072
ISBN (Print)	978-1-5386-8105-3
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808556
Publication status	Published - 22 Aug 2019

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Publisher	IEEE
ISSN (Print)	2167-0013
ISSN (Electronic)	2167-0021

Bibliographical note

© 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

Funding: Innovate UK (Grant number 102152) and the UK Engineering and Physical Sciences Research Council (EP/N021614/1).

Keywords

Energy harvesting
MEMS
piezoelectric transducers
power management
rectification
soft stoppers
wireless sensor networks

Access to Document

10.1109/TRANSDUCERS.2019.8808556

MEMS PIEZOELECTRIC ENERGY HARVESTERAccepted author manuscript, 515 KB

Cite this

Du, S., Jia, Y., Arroyo, E., Fernandez, S., Riches, S. T., & Seshia, A. A. (2019). MEMS Piezoelectric Energy Harvester Powered Wireless Sensor Module Driven by Noisy Base Excitation. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 350-353). Article 8808556 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)). IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808556

Du, Sijun ; Jia, Yu ; Arroyo, Emmanuelle et al. / MEMS Piezoelectric Energy Harvester Powered Wireless Sensor Module Driven by Noisy Base Excitation. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE, 2019. pp. 350-353 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)).

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abstract = "Despite recent advances in MEMS vibration energy harvesting and ultra-low power wireless sensors, designing a wireless sensor system entirely powered by a single MEMS device under noisy base excitation has remained a challenge. This paper presents a wireless sensor system co-integrated with a single MEMS piezoelectric vibration energy harvester chip excited by band-limited large amplitude noisy vibration characteristic of an automotive application. The use of soft stoppers in the MEMS package enables the harvesters to operate at an excitation level of 10 g(rms). A custom thick AlN (Aluminum Nitride) piezoelectric process is employed to fabricate the MEMS harvesters with a single MEMS chip generating 179 μW rectified power under these excitation conditions. A low-power wireless sensor module and a receiver module were also designed and demonstrated in this work. Experiments show that the wireless sensor module can be powered solely by the MEMS energy harvester commencing from the cold state. Successful wireless data transmission and receival of sensor data packets are recorded under representative conditions.",

keywords = "Energy harvesting, MEMS, piezoelectric transducers, power management, rectification, soft stoppers, wireless sensor networks",

author = "Sijun Du and Yu Jia and Emmanuelle Arroyo and S. Fernandez and Riches, {S. T.} and Seshia, {Ashwin A}",

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Du, S, Jia, Y, Arroyo, E, Fernandez, S, Riches, ST & Seshia, AA 2019, MEMS Piezoelectric Energy Harvester Powered Wireless Sensor Module Driven by Noisy Base Excitation. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808556, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), IEEE, pp. 350-353. https://doi.org/10.1109/TRANSDUCERS.2019.8808556

MEMS Piezoelectric Energy Harvester Powered Wireless Sensor Module Driven by Noisy Base Excitation. / Du, Sijun; Jia, Yu; Arroyo, Emmanuelle et al.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE, 2019. p. 350-353 8808556 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)).

Research output: Chapter in Book/Published conference output › Conference publication

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T1 - MEMS Piezoelectric Energy Harvester Powered Wireless Sensor Module Driven by Noisy Base Excitation

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AU - Jia, Yu

AU - Arroyo, Emmanuelle

AU - Fernandez, S.

AU - Riches, S. T.

AU - Seshia, Ashwin A

N1 - © 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. Funding: Innovate UK (Grant number 102152) and the UK Engineering and Physical Sciences Research Council (EP/N021614/1).

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N2 - Despite recent advances in MEMS vibration energy harvesting and ultra-low power wireless sensors, designing a wireless sensor system entirely powered by a single MEMS device under noisy base excitation has remained a challenge. This paper presents a wireless sensor system co-integrated with a single MEMS piezoelectric vibration energy harvester chip excited by band-limited large amplitude noisy vibration characteristic of an automotive application. The use of soft stoppers in the MEMS package enables the harvesters to operate at an excitation level of 10 g(rms). A custom thick AlN (Aluminum Nitride) piezoelectric process is employed to fabricate the MEMS harvesters with a single MEMS chip generating 179 μW rectified power under these excitation conditions. A low-power wireless sensor module and a receiver module were also designed and demonstrated in this work. Experiments show that the wireless sensor module can be powered solely by the MEMS energy harvester commencing from the cold state. Successful wireless data transmission and receival of sensor data packets are recorded under representative conditions.

AB - Despite recent advances in MEMS vibration energy harvesting and ultra-low power wireless sensors, designing a wireless sensor system entirely powered by a single MEMS device under noisy base excitation has remained a challenge. This paper presents a wireless sensor system co-integrated with a single MEMS piezoelectric vibration energy harvester chip excited by band-limited large amplitude noisy vibration characteristic of an automotive application. The use of soft stoppers in the MEMS package enables the harvesters to operate at an excitation level of 10 g(rms). A custom thick AlN (Aluminum Nitride) piezoelectric process is employed to fabricate the MEMS harvesters with a single MEMS chip generating 179 μW rectified power under these excitation conditions. A low-power wireless sensor module and a receiver module were also designed and demonstrated in this work. Experiments show that the wireless sensor module can be powered solely by the MEMS energy harvester commencing from the cold state. Successful wireless data transmission and receival of sensor data packets are recorded under representative conditions.

KW - Energy harvesting

KW - MEMS

KW - piezoelectric transducers

KW - power management

KW - rectification

KW - soft stoppers

KW - wireless sensor networks

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DO - 10.1109/TRANSDUCERS.2019.8808556

M3 - Conference publication

SN - 978-1-5386-8105-3

T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

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EP - 353

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

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Du S, Jia Y, Arroyo E, Fernandez S, Riches ST, Seshia AA. MEMS Piezoelectric Energy Harvester Powered Wireless Sensor Module Driven by Noisy Base Excitation. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE. 2019. p. 350-353. 8808556. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)). Epub 2019 Aug 22. doi: 10.1109/TRANSDUCERS.2019.8808556

MEMS Piezoelectric Energy Harvester Powered Wireless Sensor Module Driven by Noisy Base Excitation

Abstract

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Keywords

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