Method of detecting of thin-film coating thickness by means of 0.63-μ laser radiation

V. P. Osipov*, V. N. Chijevski, D. V. Shabrov

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Abstract

It is described the express optical method of evaluation of thin-film coatings, deposited on metal or semiconductor surface. For the tested samples of enamel-covered duralumin it is found the linear dependence of maximal intensity and half-width of secondary radiation on the thickness of the coating.

Original languageEnglish
Article number673213
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume6732
DOIs
Publication statusPublished - 28 Jun 2007
EventInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies - Minsk, Belarus
Duration: 28 May 20071 Jun 2007

Keywords

  • Film thickness measurement
  • Solid surface detecting
  • Thin film testing

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