Micro-holographic methods for sub-micrometer grating fabrication in fused silica with UV femtosecond laser

Mykhaylo Dubov, Ruslan K. Nasyrov, David N. Nikogosyan, Alexander G. Poleshchuk, Vladimir Mezentsev, Ian Bennion

Research output: Chapter in Book/Published conference outputConference publication


The optical layouts incorporating binary phase diffractive grating and a standard micro-objective were used for femtosecond microfabrication of periodical structures in fused silica. Two beams, generated in Talbot type interferometer, interfered on a surface and in the bulk of the sample. The method suggested allows better control over the transverse size of the grating pitch, and thus control the reflection strength of the waveguide or fibre grating. We present the examples of direct inscription of the sub-micrometer periodical structures using a 267 nm femtosecond laser radiation.
Original languageEnglish
Title of host publicationOptical Design and Engineering III
EditorsLaurent Mazuray, Rolf Wartmann, Andrew Wood, Jean-Luc Tissot, Jeffrey M. Raynor
Pages7100 0T
ISBN (Print)978-08194-7330-1
Publication statusPublished - 27 Sept 2008
EventOptical Design and Engineering III - Glasgow, United Kingdom
Duration: 2 Sept 20085 Sept 2008

Publication series

NameSPIE proceedings
ISSN (Print)0277-786X


ConferenceOptical Design and Engineering III
Country/TerritoryUnited Kingdom

Bibliographical note

Copyright 2008 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.


  • fiber Bragg gratings
  • holograms
  • micrometers
  • optical design
  • optical engineering
  • oxides
  • pulsed laser applications
  • silica
  • thickness measurement
  • ultrashort pulses
  • Bragg
  • femtosecond
  • grating
  • micro-holographic
  • Talbot
  • UV


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