Phase-sensitive detection for optical sensing with porous silicon

J. Álvarez*, N. Kumar, P. Bettotti, D. Hill, J. Martínez-Pastor

*Corresponding author for this work

Research output: Contribution to journalArticle

Abstract

We report on a photonic sensor with an ultralow limit of detection (LoD) based on a phase interrogation readout scheme together with an anisotropic porous silicon (PSi) membrane. First, the fabrication of porous free-standing membranes from medium doped (100) surface oriented silicon, with pore diameters suitable for the infiltration of biomolecules, around 50 nm, is reported. Then, the phase interrogation scheme for characterizing the PSi membranes is presented whose results show that while volumetric sensitivity increases with the membrane thickness, the resolution in the birefringence measurements decrease dramatically due to depolarization effects. The best LoD was found to be equal to 6.25 × 10 -6 RIU, from the thinnest 10-μm-thick membrane. Finally, the thermooptic coefficient of the 10 μm membrane was measured in an aqueous environment and shown to be equal to 8 × 10 -4 rad/°C.

Original languageEnglish
Article number6205328
Pages (from-to)986-995
Number of pages10
JournalIEEE Photonics Journal
Volume4
Issue number3
DOIs
Publication statusPublished - 25 Jun 2012

Fingerprint

Porous silicon
porous silicon
membranes
Membranes
interrogation
Depolarization
Biomolecules
infiltration
Birefringence
Infiltration
depolarization
Photonics
birefringence
readout
photonics
porosity
Fabrication
Silicon
fabrication
sensitivity

Keywords

  • fabrication and characterization
  • metrology
  • scattering
  • Sensors
  • subwavelength structures

Cite this

Álvarez, J., Kumar, N., Bettotti, P., Hill, D., & Martínez-Pastor, J. (2012). Phase-sensitive detection for optical sensing with porous silicon. IEEE Photonics Journal, 4(3), 986-995. [6205328]. https://doi.org/10.1109/JPHOT.2012.2201461
Álvarez, J. ; Kumar, N. ; Bettotti, P. ; Hill, D. ; Martínez-Pastor, J. / Phase-sensitive detection for optical sensing with porous silicon. In: IEEE Photonics Journal. 2012 ; Vol. 4, No. 3. pp. 986-995.
@article{44807495619d44879137696dbb12f1aa,
title = "Phase-sensitive detection for optical sensing with porous silicon",
abstract = "We report on a photonic sensor with an ultralow limit of detection (LoD) based on a phase interrogation readout scheme together with an anisotropic porous silicon (PSi) membrane. First, the fabrication of porous free-standing membranes from medium doped (100) surface oriented silicon, with pore diameters suitable for the infiltration of biomolecules, around 50 nm, is reported. Then, the phase interrogation scheme for characterizing the PSi membranes is presented whose results show that while volumetric sensitivity increases with the membrane thickness, the resolution in the birefringence measurements decrease dramatically due to depolarization effects. The best LoD was found to be equal to 6.25 × 10 -6 RIU, from the thinnest 10-μm-thick membrane. Finally, the thermooptic coefficient of the 10 μm membrane was measured in an aqueous environment and shown to be equal to 8 × 10 -4 rad/°C.",
keywords = "fabrication and characterization, metrology, scattering, Sensors, subwavelength structures",
author = "J. {\'A}lvarez and N. Kumar and P. Bettotti and D. Hill and J. Mart{\'i}nez-Pastor",
year = "2012",
month = "6",
day = "25",
doi = "10.1109/JPHOT.2012.2201461",
language = "English",
volume = "4",
pages = "986--995",
journal = "IEEE Photonics Journal",
issn = "1943-0647",
publisher = "IEEE",
number = "3",

}

Álvarez, J, Kumar, N, Bettotti, P, Hill, D & Martínez-Pastor, J 2012, 'Phase-sensitive detection for optical sensing with porous silicon', IEEE Photonics Journal, vol. 4, no. 3, 6205328, pp. 986-995. https://doi.org/10.1109/JPHOT.2012.2201461

Phase-sensitive detection for optical sensing with porous silicon. / Álvarez, J.; Kumar, N.; Bettotti, P.; Hill, D.; Martínez-Pastor, J.

In: IEEE Photonics Journal, Vol. 4, No. 3, 6205328, 25.06.2012, p. 986-995.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Phase-sensitive detection for optical sensing with porous silicon

AU - Álvarez, J.

AU - Kumar, N.

AU - Bettotti, P.

AU - Hill, D.

AU - Martínez-Pastor, J.

PY - 2012/6/25

Y1 - 2012/6/25

N2 - We report on a photonic sensor with an ultralow limit of detection (LoD) based on a phase interrogation readout scheme together with an anisotropic porous silicon (PSi) membrane. First, the fabrication of porous free-standing membranes from medium doped (100) surface oriented silicon, with pore diameters suitable for the infiltration of biomolecules, around 50 nm, is reported. Then, the phase interrogation scheme for characterizing the PSi membranes is presented whose results show that while volumetric sensitivity increases with the membrane thickness, the resolution in the birefringence measurements decrease dramatically due to depolarization effects. The best LoD was found to be equal to 6.25 × 10 -6 RIU, from the thinnest 10-μm-thick membrane. Finally, the thermooptic coefficient of the 10 μm membrane was measured in an aqueous environment and shown to be equal to 8 × 10 -4 rad/°C.

AB - We report on a photonic sensor with an ultralow limit of detection (LoD) based on a phase interrogation readout scheme together with an anisotropic porous silicon (PSi) membrane. First, the fabrication of porous free-standing membranes from medium doped (100) surface oriented silicon, with pore diameters suitable for the infiltration of biomolecules, around 50 nm, is reported. Then, the phase interrogation scheme for characterizing the PSi membranes is presented whose results show that while volumetric sensitivity increases with the membrane thickness, the resolution in the birefringence measurements decrease dramatically due to depolarization effects. The best LoD was found to be equal to 6.25 × 10 -6 RIU, from the thinnest 10-μm-thick membrane. Finally, the thermooptic coefficient of the 10 μm membrane was measured in an aqueous environment and shown to be equal to 8 × 10 -4 rad/°C.

KW - fabrication and characterization

KW - metrology

KW - scattering

KW - Sensors

KW - subwavelength structures

UR - http://www.scopus.com/inward/record.url?scp=84862585706&partnerID=8YFLogxK

UR - https://ieeexplore.ieee.org/document/6205328

U2 - 10.1109/JPHOT.2012.2201461

DO - 10.1109/JPHOT.2012.2201461

M3 - Article

AN - SCOPUS:84862585706

VL - 4

SP - 986

EP - 995

JO - IEEE Photonics Journal

JF - IEEE Photonics Journal

SN - 1943-0647

IS - 3

M1 - 6205328

ER -

Álvarez J, Kumar N, Bettotti P, Hill D, Martínez-Pastor J. Phase-sensitive detection for optical sensing with porous silicon. IEEE Photonics Journal. 2012 Jun 25;4(3):986-995. 6205328. https://doi.org/10.1109/JPHOT.2012.2201461