Phase-sensitive detection for optical sensing with porous silicon

J. Álvarez; N. Kumar; P. Bettotti; D. Hill; J. Martínez-Pastor

doi:10.1109/JPHOT.2012.2201461

Phase-sensitive detection for optical sensing with porous silicon

J. Álvarez^*
, N. Kumar
, P. Bettotti
, D. Hill
, J. Martínez-Pastor

^*Corresponding author for this work

Aston Institute of Photonic Technologies (AiPT)

Universitat de València
Università degli Studi di Trento

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

We report on a photonic sensor with an ultralow limit of detection (LoD) based on a phase interrogation readout scheme together with an anisotropic porous silicon (PSi) membrane. First, the fabrication of porous free-standing membranes from medium doped (100) surface oriented silicon, with pore diameters suitable for the infiltration of biomolecules, around 50 nm, is reported. Then, the phase interrogation scheme for characterizing the PSi membranes is presented whose results show that while volumetric sensitivity increases with the membrane thickness, the resolution in the birefringence measurements decrease dramatically due to depolarization effects. The best LoD was found to be equal to 6.25 × 10 ^-6 RIU, from the thinnest 10-μm-thick membrane. Finally, the thermooptic coefficient of the 10 μm membrane was measured in an aqueous environment and shown to be equal to 8 × 10 ^-4 rad/°C.

Original language	English
Article number	6205328
Pages (from-to)	986-995
Number of pages	10
Journal	IEEE Photonics Journal
Volume	4
Issue number	3
DOIs	https://doi.org/10.1109/JPHOT.2012.2201461
Publication status	Published - 25 Jun 2012

Funding

Manuscript received March 10, 2012; revised May 18, 2012; accepted May 20, 2012. Date of publication May 25, 2012; date of current version June 13, 2012. This research was supported by the EC through the project FP7-257401 POSITIVE. Corresponding author: J. Álvarez (e-mail: jesus. [email protected]).

Keywords

fabrication and characterization
metrology
scattering
Sensors
subwavelength structures

Access to Document

10.1109/JPHOT.2012.2201461

Cite this

@article{44807495619d44879137696dbb12f1aa,

title = "Phase-sensitive detection for optical sensing with porous silicon",

abstract = "We report on a photonic sensor with an ultralow limit of detection (LoD) based on a phase interrogation readout scheme together with an anisotropic porous silicon (PSi) membrane. First, the fabrication of porous free-standing membranes from medium doped (100) surface oriented silicon, with pore diameters suitable for the infiltration of biomolecules, around 50 nm, is reported. Then, the phase interrogation scheme for characterizing the PSi membranes is presented whose results show that while volumetric sensitivity increases with the membrane thickness, the resolution in the birefringence measurements decrease dramatically due to depolarization effects. The best LoD was found to be equal to 6.25 × 10 -6 RIU, from the thinnest 10-μm-thick membrane. Finally, the thermooptic coefficient of the 10 μm membrane was measured in an aqueous environment and shown to be equal to 8 × 10 -4 rad/°C.",

keywords = "fabrication and characterization, metrology, scattering, Sensors, subwavelength structures",

author = "J. {\'A}lvarez and N. Kumar and P. Bettotti and D. Hill and J. Mart{\'i}nez-Pastor",

year = "2012",

month = jun,

day = "25",

doi = "10.1109/JPHOT.2012.2201461",

language = "English",

volume = "4",

pages = "986--995",

journal = "IEEE Photonics Journal",

issn = "1943-0655",

publisher = "IEEE",

number = "3",

}

TY - JOUR

T1 - Phase-sensitive detection for optical sensing with porous silicon

AU - Álvarez, J.

AU - Kumar, N.

AU - Bettotti, P.

AU - Hill, D.

AU - Martínez-Pastor, J.

PY - 2012/6/25

Y1 - 2012/6/25

N2 - We report on a photonic sensor with an ultralow limit of detection (LoD) based on a phase interrogation readout scheme together with an anisotropic porous silicon (PSi) membrane. First, the fabrication of porous free-standing membranes from medium doped (100) surface oriented silicon, with pore diameters suitable for the infiltration of biomolecules, around 50 nm, is reported. Then, the phase interrogation scheme for characterizing the PSi membranes is presented whose results show that while volumetric sensitivity increases with the membrane thickness, the resolution in the birefringence measurements decrease dramatically due to depolarization effects. The best LoD was found to be equal to 6.25 × 10 -6 RIU, from the thinnest 10-μm-thick membrane. Finally, the thermooptic coefficient of the 10 μm membrane was measured in an aqueous environment and shown to be equal to 8 × 10 -4 rad/°C.

AB - We report on a photonic sensor with an ultralow limit of detection (LoD) based on a phase interrogation readout scheme together with an anisotropic porous silicon (PSi) membrane. First, the fabrication of porous free-standing membranes from medium doped (100) surface oriented silicon, with pore diameters suitable for the infiltration of biomolecules, around 50 nm, is reported. Then, the phase interrogation scheme for characterizing the PSi membranes is presented whose results show that while volumetric sensitivity increases with the membrane thickness, the resolution in the birefringence measurements decrease dramatically due to depolarization effects. The best LoD was found to be equal to 6.25 × 10 -6 RIU, from the thinnest 10-μm-thick membrane. Finally, the thermooptic coefficient of the 10 μm membrane was measured in an aqueous environment and shown to be equal to 8 × 10 -4 rad/°C.

KW - fabrication and characterization

KW - metrology

KW - scattering

KW - Sensors

KW - subwavelength structures

UR - https://www.scopus.com/pages/publications/84862585706

UR - https://ieeexplore.ieee.org/document/6205328

U2 - 10.1109/JPHOT.2012.2201461

DO - 10.1109/JPHOT.2012.2201461

M3 - Article

AN - SCOPUS:84862585706

SN - 1943-0655

VL - 4

SP - 986

EP - 995

JO - IEEE Photonics Journal

JF - IEEE Photonics Journal

IS - 3

M1 - 6205328

ER -

Phase-sensitive detection for optical sensing with porous silicon

Abstract

Funding

Keywords

Access to Document

Other files and links

Fingerprint

Cite this