Preparation of PbTe thin films for high-sensitive Mid-IR photodetectors by PECVD

Leonid Mochalov*, Alexander Logunov, Igor Prokhorov, Tatiana Sazanova, Sergey Zelentsov, Aleksander Knyazev, Nikolay Starostin, Aleksey Letnianchik, Edik Rafailov, Vladimir Vorotyntsev

*Corresponding author for this work

Research output: Chapter in Book/Published conference outputConference publication

Abstract

Lead telluride (PbTe) possesses a good performance as a thermoelectric material due to both a low thermal conductivity and its electrical properties. It has peak thermoelectric characteristics at high temperature and is widely used in spacecraft power applications and as a waveguide-integrated detector monolithically integrated on a silicon substrate and operating at room temperature. In this work PbTe thin films were prepared via direct plasma-chemical interaction of lead and tellurium vapors. Argon of high purity was also used as a career gas for precursors transport to the plasma zone and as a plasma feed gas. The process was carried out at the low pressure (0.01 Torr) in inductively coupled non-equilibrium RF (40.68 MHz) plasma discharge. Optical emission spectroscopy (OES) was used to identify the exited species and to assume the possible mechanisms of plasma-chemical reactions. The stoichiometry, structure and morphology of the surface of the materials obtained was also studied by deferent analytical techniques dependently on the conditions of the plasma process.

Original languageEnglish
Title of host publication2020 22nd International Conference on Transparent Optical Networks, ICTON 2020
PublisherIEEE
ISBN (Electronic)9781728184234
DOIs
Publication statusPublished - 22 Sep 2020
Event22nd International Conference on Transparent Optical Networks, ICTON 2020 - Bari, Italy
Duration: 19 Jul 202023 Jul 2020

Publication series

NameInternational Conference on Transparent Optical Networks
Volume2020-July
ISSN (Electronic)2162-7339

Conference

Conference22nd International Conference on Transparent Optical Networks, ICTON 2020
CountryItaly
CityBari
Period19/07/2023/07/20

Bibliographical note

Funding Information:
The reported study was supported by Russian Science Foundation, grant ʋ 19-79-10124 «Development of scientific fundamentals of the plasma-chemical synthesis of new generation of the functional materials for the mid-IR range».

Keywords

  • Lead telluride
  • Mid-IR detectors
  • Nanostructures
  • Plasma deposition

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