Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis

K. B. Gylfason, B. Sánchez, A. Griol, C. A. Barrios, H. Sohlström, M. J. Bañuls, V. González-Pedro, A. Maquieira, M. Holgado, R. Casquel, D. Hill, G. Stemme

Research output: Contribution to conferencePaper

Abstract

We report a method that enables the combination of integrated optical systems with on-chip fluid handling for chemical analysis, without compromising the functionality of either part. Utilizing a selective isotropic plasma etch of a sacrificial chromium etch-stop layer, fluidic connections can be made down to buried nanostructured optical sensing elements in a controlled manner. We describe the fabrication method and present an example application to a label-free assay of protein concentration based on optical slot-waveguide micro-ring resonator refractive index sensors.

Original languageEnglish
Pages399-401
Number of pages3
Publication statusPublished - 1 Jan 2008
Event12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008 - San Diego, CA, United States
Duration: 12 Oct 200816 Oct 2008

Conference

Conference12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008
CountryUnited States
CitySan Diego, CA
Period12/10/0816/10/08

Keywords

  • Biosensing
  • Hybrid devices
  • Integrated optics
  • Slot-waveguides

Fingerprint Dive into the research topics of 'Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis'. Together they form a unique fingerprint.

  • Cite this

    Gylfason, K. B., Sánchez, B., Griol, A., Barrios, C. A., Sohlström, H., Bañuls, M. J., González-Pedro, V., Maquieira, A., Holgado, M., Casquel, R., Hill, D., & Stemme, G. (2008). Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis. 399-401. Paper presented at 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008, San Diego, CA, United States.