Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis

K. B. Gylfason, B. Sánchez, A. Griol, C. A. Barrios, H. Sohlström, M. J. Bañuls, V. González-Pedro, A. Maquieira, M. Holgado, R. Casquel, D. Hill, G. Stemme

Research output: Contribution to conferencePaper

Abstract

We report a method that enables the combination of integrated optical systems with on-chip fluid handling for chemical analysis, without compromising the functionality of either part. Utilizing a selective isotropic plasma etch of a sacrificial chromium etch-stop layer, fluidic connections can be made down to buried nanostructured optical sensing elements in a controlled manner. We describe the fabrication method and present an example application to a label-free assay of protein concentration based on optical slot-waveguide micro-ring resonator refractive index sensors.

Original languageEnglish
Pages399-401
Number of pages3
Publication statusPublished - 1 Jan 2008
Event12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008 - San Diego, CA, United States
Duration: 12 Oct 200816 Oct 2008

Conference

Conference12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008
CountryUnited States
CitySan Diego, CA
Period12/10/0816/10/08

Fingerprint

Fluidics
Optical waveguides
Chromium
Optical systems
Labels
Resonators
Assays
Refractive index
Waveguides
Proteins
Plasmas
Fabrication
Fluids
Sensors
Chemical analysis

Keywords

  • Biosensing
  • Hybrid devices
  • Integrated optics
  • Slot-waveguides

Cite this

Gylfason, K. B., Sánchez, B., Griol, A., Barrios, C. A., Sohlström, H., Bañuls, M. J., ... Stemme, G. (2008). Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis. 399-401. Paper presented at 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008, San Diego, CA, United States.
Gylfason, K. B. ; Sánchez, B. ; Griol, A. ; Barrios, C. A. ; Sohlström, H. ; Bañuls, M. J. ; González-Pedro, V. ; Maquieira, A. ; Holgado, M. ; Casquel, R. ; Hill, D. ; Stemme, G. / Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis. Paper presented at 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008, San Diego, CA, United States.3 p.
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abstract = "We report a method that enables the combination of integrated optical systems with on-chip fluid handling for chemical analysis, without compromising the functionality of either part. Utilizing a selective isotropic plasma etch of a sacrificial chromium etch-stop layer, fluidic connections can be made down to buried nanostructured optical sensing elements in a controlled manner. We describe the fabrication method and present an example application to a label-free assay of protein concentration based on optical slot-waveguide micro-ring resonator refractive index sensors.",
keywords = "Biosensing, Hybrid devices, Integrated optics, Slot-waveguides",
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Gylfason, KB, Sánchez, B, Griol, A, Barrios, CA, Sohlström, H, Bañuls, MJ, González-Pedro, V, Maquieira, A, Holgado, M, Casquel, R, Hill, D & Stemme, G 2008, 'Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis' Paper presented at 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008, San Diego, CA, United States, 12/10/08 - 16/10/08, pp. 399-401.

Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis. / Gylfason, K. B.; Sánchez, B.; Griol, A.; Barrios, C. A.; Sohlström, H.; Bañuls, M. J.; González-Pedro, V.; Maquieira, A.; Holgado, M.; Casquel, R.; Hill, D.; Stemme, G.

2008. 399-401 Paper presented at 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008, San Diego, CA, United States.

Research output: Contribution to conferencePaper

TY - CONF

T1 - Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis

AU - Gylfason, K. B.

AU - Sánchez, B.

AU - Griol, A.

AU - Barrios, C. A.

AU - Sohlström, H.

AU - Bañuls, M. J.

AU - González-Pedro, V.

AU - Maquieira, A.

AU - Holgado, M.

AU - Casquel, R.

AU - Hill, D.

AU - Stemme, G.

PY - 2008/1/1

Y1 - 2008/1/1

N2 - We report a method that enables the combination of integrated optical systems with on-chip fluid handling for chemical analysis, without compromising the functionality of either part. Utilizing a selective isotropic plasma etch of a sacrificial chromium etch-stop layer, fluidic connections can be made down to buried nanostructured optical sensing elements in a controlled manner. We describe the fabrication method and present an example application to a label-free assay of protein concentration based on optical slot-waveguide micro-ring resonator refractive index sensors.

AB - We report a method that enables the combination of integrated optical systems with on-chip fluid handling for chemical analysis, without compromising the functionality of either part. Utilizing a selective isotropic plasma etch of a sacrificial chromium etch-stop layer, fluidic connections can be made down to buried nanostructured optical sensing elements in a controlled manner. We describe the fabrication method and present an example application to a label-free assay of protein concentration based on optical slot-waveguide micro-ring resonator refractive index sensors.

KW - Biosensing

KW - Hybrid devices

KW - Integrated optics

KW - Slot-waveguides

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M3 - Paper

AN - SCOPUS:84902438745

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ER -

Gylfason KB, Sánchez B, Griol A, Barrios CA, Sohlström H, Bañuls MJ et al. Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis. 2008. Paper presented at 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008, San Diego, CA, United States.