Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis

K. B. Gylfason; B. Sánchez; A. Griol; C. A. Barrios; H. Sohlström; M. J. Bañuls; V. González-Pedro; A. Maquieira; M. Holgado; R. Casquel; D. Hill; G. Stemme

Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis

K. B. Gylfason
, B. Sánchez
, A. Griol
, C. A. Barrios
, H. Sohlström
, M. J. Bañuls
, V. González-Pedro
, A. Maquieira
, M. Holgado
, R. Casquel
, D. Hill
, G. Stemme

Aston Institute of Photonic Technologies (AiPT)

Kungliga Tekniska Högskolan
ITACA–Universitat Politècnica de Valéncia
Universidad Politécnica de Madrid

Research output: Unpublished contribution to conference › Unpublished Conference Paper › peer-review

2 Citations (Scopus)

Abstract

We report a method that enables the combination of integrated optical systems with on-chip fluid handling for chemical analysis, without compromising the functionality of either part. Utilizing a selective isotropic plasma etch of a sacrificial chromium etch-stop layer, fluidic connections can be made down to buried nanostructured optical sensing elements in a controlled manner. We describe the fabrication method and present an example application to a label-free assay of protein concentration based on optical slot-waveguide micro-ring resonator refractive index sensors.

Original language	English
Pages	399-401
Number of pages	3
Publication status	Published - 1 Jan 2008
Event	12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008 - San Diego, CA, United States Duration: 12 Oct 2008 → 16 Oct 2008

Conference

Conference	12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008
Country/Territory	United States
City	San Diego, CA
Period	12/10/08 → 16/10/08

Keywords

Biosensing
Hybrid devices
Integrated optics
Slot-waveguides

Cite this

Gylfason, K. B., Sánchez, B., Griol, A., Barrios, C. A., Sohlström, H., Bañuls, M. J., González-Pedro, V., Maquieira, A., Holgado, M., Casquel, R., Hill, D., & Stemme, G. (2008). Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis. 399-401. Paper presented at 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008, San Diego, CA, United States.

@conference{203f35d535094a69a3b4800aa85c3e38,

title = "Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis",

abstract = "We report a method that enables the combination of integrated optical systems with on-chip fluid handling for chemical analysis, without compromising the functionality of either part. Utilizing a selective isotropic plasma etch of a sacrificial chromium etch-stop layer, fluidic connections can be made down to buried nanostructured optical sensing elements in a controlled manner. We describe the fabrication method and present an example application to a label-free assay of protein concentration based on optical slot-waveguide micro-ring resonator refractive index sensors.",

keywords = "Biosensing, Hybrid devices, Integrated optics, Slot-waveguides",

author = "Gylfason, \{K. B.\} and B. S{\'a}nchez and A. Griol and Barrios, \{C. A.\} and H. Sohlstr{\"o}m and Ba{\~n}uls, \{M. J.\} and V. Gonz{\'a}lez-Pedro and A. Maquieira and M. Holgado and R. Casquel and D. Hill and G. Stemme",

year = "2008",

month = jan,

day = "1",

language = "English",

pages = "399--401",

note = "12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008 ; Conference date: 12-10-2008 Through 16-10-2008",

}

Gylfason, KB, Sánchez, B, Griol, A, Barrios, CA, Sohlström, H, Bañuls, MJ, González-Pedro, V, Maquieira, A, Holgado, M, Casquel, R, Hill, D & Stemme, G 2008, 'Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis', Paper presented at 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008, San Diego, CA, United States, 12/10/08 - 16/10/08 pp. 399-401.

Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis. / Gylfason, K. B.; Sánchez, B.; Griol, A. et al.
2008. 399-401 Paper presented at 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008, San Diego, CA, United States.

Research output: Unpublished contribution to conference › Unpublished Conference Paper › peer-review

TY - CONF

T1 - Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis

AU - Gylfason, K. B.

AU - Sánchez, B.

AU - Griol, A.

AU - Barrios, C. A.

AU - Sohlström, H.

AU - Bañuls, M. J.

AU - González-Pedro, V.

AU - Maquieira, A.

AU - Holgado, M.

AU - Casquel, R.

AU - Hill, D.

AU - Stemme, G.

PY - 2008/1/1

Y1 - 2008/1/1

N2 - We report a method that enables the combination of integrated optical systems with on-chip fluid handling for chemical analysis, without compromising the functionality of either part. Utilizing a selective isotropic plasma etch of a sacrificial chromium etch-stop layer, fluidic connections can be made down to buried nanostructured optical sensing elements in a controlled manner. We describe the fabrication method and present an example application to a label-free assay of protein concentration based on optical slot-waveguide micro-ring resonator refractive index sensors.

AB - We report a method that enables the combination of integrated optical systems with on-chip fluid handling for chemical analysis, without compromising the functionality of either part. Utilizing a selective isotropic plasma etch of a sacrificial chromium etch-stop layer, fluidic connections can be made down to buried nanostructured optical sensing elements in a controlled manner. We describe the fabrication method and present an example application to a label-free assay of protein concentration based on optical slot-waveguide micro-ring resonator refractive index sensors.

KW - Biosensing

KW - Hybrid devices

KW - Integrated optics

KW - Slot-waveguides

UR - https://www.scopus.com/pages/publications/84902438745

M3 - Unpublished Conference Paper

AN - SCOPUS:84902438745

SP - 399

EP - 401

T2 - 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008

Y2 - 12 October 2008 through 16 October 2008

ER -

Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis

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Keywords

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