The effects of pulsed substrate biasing on thin amorphous carbon coatings: a statistical design of experiment study

Keyphrases

• Pulse Width 100%
• Amorphous Carbon Coating 100%
• Statistical Experimental Design 100%
• Substrate Biasing 100%
• Voltage Pulse 33%
• Mechanical Properties 33%
• Nanoindentation 33%
• Atomic Force Microscopy 33%
• X-ray Photoelectron Spectroscopy 33%
• Design of Experiments 33%
• Surface Topography 33%
• Coating Properties 33%
• Bias Conditions 33%
• Bias Voltage 33%
• Substrate Bias Voltage 33%
• Nanoscratch 33%
• Parameter-varying 33%
• Operating Window 33%
• Bias Pulse 33%
• Medium Frequency 33%
• Pulse Frequency 33%
• Bias Factor 33%
• Pulsed Bias 33%
• Media Effects 33%
• Peak Voltage 33%
• Pulsed Substrate Bias 33%
• Bias Frequency 33%

Engineering

• Pulse Duration 100%
• Design of Experiments 100%
• Amorphous Carbon 100%
• Bias Voltage 66%
• Atomic Force Microscopy 33%
• Ray Photoelectron Spectroscopy 33%
• Substrate Bias 33%
• Surface Topography 33%
• Interrelationship 33%
• Coating Property 33%
• Pulse Frequency 33%