The Laser MicroJet® (LMJ) - A multi-solution technology for high quality micro-machining

Tuan Anh Mai; Bernold Richerzhagen; Paul C. Snowdon; David Wood; Paul G. Maropoulos

doi:10.1117/12.701070

The Laser MicroJet® (LMJ) - A multi-solution technology for high quality micro-machining

Tuan Anh Mai^*, Bernold Richerzhagen, Paul C. Snowdon, David Wood, Paul G. Maropoulos

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

Abstract

The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1], The main issues by using these lasers are heat damages, contamination and low ablation rates, This report examines on the application of the Laser MicroJet® (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.

Original language	English
Journal	Proceedings of SPIE - International Society for Optical Engineering
Volume	6459
DOIs	https://doi.org/10.1117/12.701070
Publication status	Published - 2007
Event	Laser-based micro- and nanopackaging and assembly - San Jose, CA, United States Duration: 22 Jan 2007 → 24 Jan 2007

Bibliographical note

Copyright 2007 SPIE. One print or electronic copy may be made for personal use only. Systematic reproduction, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

Keywords

Laser microjet®
MEMS
Micro-machining
Water guided laser

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10.1117/12.701070

The Laser MicroJet (LMJ): a multi-solution technology for high quality micro-machining
Copyright 2007 SPIE. One print or electronic copy may be made for personal use only. Systematic reproduction, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
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title = "The Laser MicroJet{\textregistered} (LMJ) - A multi-solution technology for high quality micro-machining",

abstract = "The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1], The main issues by using these lasers are heat damages, contamination and low ablation rates, This report examines on the application of the Laser MicroJet{\textregistered} (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.",

keywords = "Laser microjet{\textregistered}, MEMS, Micro-machining, Water guided laser",

author = "Mai, {Tuan Anh} and Bernold Richerzhagen and Snowdon, {Paul C.} and David Wood and Maropoulos, {Paul G.}",

note = "Copyright 2007 SPIE. One print or electronic copy may be made for personal use only. Systematic reproduction, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. ; Laser-based micro- and nanopackaging and assembly ; Conference date: 22-01-2007 Through 24-01-2007",

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AU - Mai, Tuan Anh

AU - Richerzhagen, Bernold

AU - Snowdon, Paul C.

AU - Wood, David

AU - Maropoulos, Paul G.

N1 - Copyright 2007 SPIE. One print or electronic copy may be made for personal use only. Systematic reproduction, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

PY - 2007

Y1 - 2007

N2 - The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1], The main issues by using these lasers are heat damages, contamination and low ablation rates, This report examines on the application of the Laser MicroJet® (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.

AB - The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1], The main issues by using these lasers are heat damages, contamination and low ablation rates, This report examines on the application of the Laser MicroJet® (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.

KW - Laser microjet®

KW - MEMS

KW - Micro-machining

KW - Water guided laser

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The Laser MicroJet® (LMJ) - A multi-solution technology for high quality micro-machining

Abstract

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Keywords

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