Undamaged measurement of the sub-micron diaphragm and gap by tri-beam interference

Yanping Chen; Shen Liu; Zhongyuan Sun; Lin Zhang; Namita Sahoo; Junxian Luo; Yuanyuan Zhao; Changrui Liao; Bin Du; Chi Li; Yiping Wang

doi:10.1109/JLT.2019.2940502

Undamaged measurement of the sub-micron diaphragm and gap by tri-beam interference

Yanping Chen, Shen Liu, Zhongyuan Sun, Lin Zhang, Namita Sahoo, Junxian Luo, Yuanyuan Zhao, Changrui Liao, Bin Du, Chi Li, Yiping Wang

Research output: Contribution to journal › Article › peer-review

Abstract

A simple, high-accuracy and non-destructive method for the measurement of diaphragm thickness and microgap width based on modulated tri-beam interference is demonstrated. With this method, a theoretical estimation error less than 0.5% for a diaphragm thickness of ~1 μm is achievable. Several fiber-tip air bubbles with different diaphragm thicknesses (6.25, 5.0, 2.5 and 1.25 μm) were fabricated to verify our proposed measurement method. Furthermore, an improved technique was introduced by immersing the measured object into a liquid environment to simplify a four-beam interference into tri-beam one. By applying this improved technique, the diaphragm thickness of a fabricated in-fiber rectangular air bubble is measured to be about 1.47 μm, and the averaged microgap width of a standard silica capillary is measured to be about 10.07 μm, giving a corresponding measurement error only 1.27% compared with actual scanning electron microscope (SEM) results.

Original language	English
Pages (from-to)	5840 - 5847
Journal	Journal of Lightwave Technology
Volume	37
Issue number	23
Early online date	10 Sept 2019
DOIs	https://doi.org/10.1109/JLT.2019.2940502
Publication status	Published - 1 Dec 2019

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© 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

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title = "Undamaged measurement of the sub-micron diaphragm and gap by tri-beam interference",

abstract = "A simple, high-accuracy and non-destructive method for the measurement of diaphragm thickness and microgap width based on modulated tri-beam interference is demonstrated. With this method, a theoretical estimation error less than 0.5% for a diaphragm thickness of ~1 μm is achievable. Several fiber-tip air bubbles with different diaphragm thicknesses (6.25, 5.0, 2.5 and 1.25 μm) were fabricated to verify our proposed measurement method. Furthermore, an improved technique was introduced by immersing the measured object into a liquid environment to simplify a four-beam interference into tri-beam one. By applying this improved technique, the diaphragm thickness of a fabricated in-fiber rectangular air bubble is measured to be about 1.47 μm, and the averaged microgap width of a standard silica capillary is measured to be about 10.07 μm, giving a corresponding measurement error only 1.27% compared with actual scanning electron microscope (SEM) results.",

author = "Yanping Chen and Shen Liu and Zhongyuan Sun and Lin Zhang and Namita Sahoo and Junxian Luo and Yuanyuan Zhao and Changrui Liao and Bin Du and Chi Li and Yiping Wang",

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AU - Chen, Yanping

AU - Liu, Shen

AU - Sun, Zhongyuan

AU - Zhang, Lin

AU - Sahoo, Namita

AU - Luo, Junxian

AU - Zhao, Yuanyuan

AU - Liao, Changrui

AU - Du, Bin

AU - Li, Chi

AU - Wang, Yiping

N1 - © 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

PY - 2019/12/1

Y1 - 2019/12/1

N2 - A simple, high-accuracy and non-destructive method for the measurement of diaphragm thickness and microgap width based on modulated tri-beam interference is demonstrated. With this method, a theoretical estimation error less than 0.5% for a diaphragm thickness of ~1 μm is achievable. Several fiber-tip air bubbles with different diaphragm thicknesses (6.25, 5.0, 2.5 and 1.25 μm) were fabricated to verify our proposed measurement method. Furthermore, an improved technique was introduced by immersing the measured object into a liquid environment to simplify a four-beam interference into tri-beam one. By applying this improved technique, the diaphragm thickness of a fabricated in-fiber rectangular air bubble is measured to be about 1.47 μm, and the averaged microgap width of a standard silica capillary is measured to be about 10.07 μm, giving a corresponding measurement error only 1.27% compared with actual scanning electron microscope (SEM) results.

AB - A simple, high-accuracy and non-destructive method for the measurement of diaphragm thickness and microgap width based on modulated tri-beam interference is demonstrated. With this method, a theoretical estimation error less than 0.5% for a diaphragm thickness of ~1 μm is achievable. Several fiber-tip air bubbles with different diaphragm thicknesses (6.25, 5.0, 2.5 and 1.25 μm) were fabricated to verify our proposed measurement method. Furthermore, an improved technique was introduced by immersing the measured object into a liquid environment to simplify a four-beam interference into tri-beam one. By applying this improved technique, the diaphragm thickness of a fabricated in-fiber rectangular air bubble is measured to be about 1.47 μm, and the averaged microgap width of a standard silica capillary is measured to be about 10.07 μm, giving a corresponding measurement error only 1.27% compared with actual scanning electron microscope (SEM) results.

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JO - Journal of Lightwave Technology

JF - Journal of Lightwave Technology

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ER -

Undamaged measurement of the sub-micron diaphragm and gap by tri-beam interference

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