Abstract
We report on the first recording of a periodic structure of ∼150 nm pitch in a permanently moving sample of a pure fused silica using the tightly focused, 82 nJ, 267 nm, 300 fs, 1 kHz laser pulses. © 2007 IOP Publishing Ltd.
Original language | English |
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Article number | L02 |
Pages (from-to) | L15 -L17 |
Journal | Measurement Science and Technology |
Volume | 18 |
Issue number | 7 |
DOIs | |
Publication status | Published - 1 Jul 2007 |
Bibliographical note
© 2007 IOP Publishing Ltd.Keywords
- DIC microscopy
- femtosecond UV laser
- fused silica
- microfabrication
- nanostructure