UV femtosecond laser inscribes a 300 nm period nanostructure in a pure fused silica

Mykhaylo Dubov*, Vladimir Mezentsev, Ian Bennion, David N. Nikogosyan

*Corresponding author for this work

Research output: Contribution to journalArticle

Abstract

We report on the first recording of a periodic structure of ∼150 nm pitch in a permanently moving sample of a pure fused silica using the tightly focused, 82 nJ, 267 nm, 300 fs, 1 kHz laser pulses. © 2007 IOP Publishing Ltd.

Original languageEnglish
Article numberL02
Pages (from-to)L15 -L17
JournalMeasurement Science and Technology
Volume18
Issue number7
DOIs
Publication statusPublished - 1 Jul 2007

Bibliographical note

© 2007 IOP Publishing Ltd.

Keywords

  • DIC microscopy
  • femtosecond UV laser
  • fused silica
  • microfabrication
  • nanostructure

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