Vertical multiple-slot waveguide ring resonators in silicon nitride

Laurent Vivien; Delphine Marris-Morini; Amadeu Griol; Kristinn B. Gylfason; Daniel Hill; Jesús Álvarez; Hans Sohlström; Juan Hurtado; David Bouville; Eric Cassan

doi:10.1364/OE.16.017237

Vertical multiple-slot waveguide ring resonators in silicon nitride

Laurent Vivien^*
, Delphine Marris-Morini
, Amadeu Griol
, Kristinn B. Gylfason
, Daniel Hill
, Jesús Álvarez
, Hans Sohlström
, Juan Hurtado
, David Bouville
, Eric Cassan

^*Corresponding author for this work

Aston Institute of Photonic Technologies (AiPT)

Université Paris-Sud 11
ITACA–Universitat Politècnica de Valéncia
Kungliga Tekniska Högskolan

Research output: Contribution to journal › Article › peer-review

48 Citations (SciVal)

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Abstract

This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 μm, 90 μm and 110 μm) have been carried out for TE and TM polarizations at the wavelength of 1.3 μm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.

Original language	English
Pages (from-to)	17237-17242
Number of pages	6
Journal	Optics Express
Volume	16
Issue number	22
DOIs	https://doi.org/10.1364/OE.16.017237
Publication status	Published - 27 Oct 2008

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10.1364/OE.16.017237

Vertical multiple-slot waveguide ring resonators in silicon nitride
©2008 Optical Society of America. This is an open access article according to the OSA Publishing guidelines https://www.osapublishing.org/submit/review/open-access-policy-statement.cfm
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title = "Vertical multiple-slot waveguide ring resonators in silicon nitride",

abstract = "This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 μm, 90 μm and 110 μm) have been carried out for TE and TM polarizations at the wavelength of 1.3 μm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.",

author = "Laurent Vivien and Delphine Marris-Morini and Amadeu Griol and Gylfason, \{Kristinn B.\} and Daniel Hill and Jes{\'u}s {\'A}lvarez and Hans Sohlstr{\"o}m and Juan Hurtado and David Bouville and Eric Cassan",

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AU - Vivien, Laurent

AU - Marris-Morini, Delphine

AU - Griol, Amadeu

AU - Gylfason, Kristinn B.

AU - Hill, Daniel

AU - Álvarez, Jesús

AU - Sohlström, Hans

AU - Hurtado, Juan

AU - Bouville, David

AU - Cassan, Eric

PY - 2008/10/27

Y1 - 2008/10/27

N2 - This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 μm, 90 μm and 110 μm) have been carried out for TE and TM polarizations at the wavelength of 1.3 μm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.

AB - This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 μm, 90 μm and 110 μm) have been carried out for TE and TM polarizations at the wavelength of 1.3 μm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.

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UR - https://www.osapublishing.org/oe/abstract.cfm?uri=oe-16-22-17237

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DO - 10.1364/OE.16.017237

M3 - Article

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VL - 16

SP - 17237

EP - 17242

JO - Optics Express

JF - Optics Express

IS - 22

ER -

Vertical multiple-slot waveguide ring resonators in silicon nitride

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