Zinc oxide nanostructured materials prepared by PECVD as a platform for biosensors

Leonid Mochalov; Alexander Logunov; Tatiana Sazanova; Artem Kulikov; Edik Rafailov; Sergey Zelentsov; Vladimir Vorotyntsev

doi:10.1109/ICTON51198.2020.9203466

Zinc oxide nanostructured materials prepared by PECVD as a platform for biosensors

Leonid Mochalov^*, Alexander Logunov, Tatiana Sazanova, Artem Kulikov, Edik Rafailov, Sergey Zelentsov, Vladimir Vorotyntsev

^*Corresponding author for this work

Aston Institute of Photonic Technologies (AiPT)

Research output: Chapter in Book/Published conference output › Conference publication

Abstract

Zinc oxide nanostructures are widely used as a platform for biosensors. Extremely sensitive gas sensors made of ZnO are not only cheap and easy to manufacture, but also diverse in terms of types of nanostructures. In this work zinc oxide nanstructures were prepared via on-stage plasma-chemical interaction of zinc vapors with oxygen. Argon of high purity was also used as a career gas for zinc transport to the discharge zone and as a plasma feed gas. The process was carried out at the low pressure (0.1 Torr) in inductively coupled nonequilibrium RF (40.68 MHz) plasma discharge. Optical emission diagnostic has been performed to characterize the main parameters of the plasma-chemical process. The AFM technique was implemented for specifications of the materials surface parameters.

Original language	English
Title of host publication	2020 22nd International Conference on Transparent Optical Networks, ICTON 2020
Publisher	IEEE
ISBN (Electronic)	9781728184234
DOIs	https://doi.org/10.1109/ICTON51198.2020.9203466
Publication status	Published - 22 Sept 2020
Event	22nd International Conference on Transparent Optical Networks, ICTON 2020 - Bari, Italy Duration: 19 Jul 2020 → 23 Jul 2020

Publication series

Name	International Conference on Transparent Optical Networks
Volume	2020-July
ISSN (Electronic)	2162-7339

Conference

Conference	22nd International Conference on Transparent Optical Networks, ICTON 2020
Country/Territory	Italy
City	Bari
Period	19/07/20 → 23/07/20

Bibliographical note

Funding Information:
The reported study was funded by RFBR according to the research project ʋ 20-08-00237 “Development of the scientific foundations of a universal plasma-chemical method for the synthesis of zinc oxide nanostructures to create luminescent devices, solar cells, gas and biosensors of a new generation”.

Keywords

Biosensors
Nanostructures
Plasma deposition
Zinc oxide

Access to Document

10.1109/ICTON51198.2020.9203466

Cite this

Mochalov, L., Logunov, A., Sazanova, T., Kulikov, A., Rafailov, E., Zelentsov, S., & Vorotyntsev, V. (2020). Zinc oxide nanostructured materials prepared by PECVD as a platform for biosensors. In 2020 22nd International Conference on Transparent Optical Networks, ICTON 2020 Article 9203466 (International Conference on Transparent Optical Networks; Vol. 2020-July). IEEE. https://doi.org/10.1109/ICTON51198.2020.9203466

@inproceedings{17eba83f745341fea9d190f2120b7c1d,

title = "Zinc oxide nanostructured materials prepared by PECVD as a platform for biosensors",

abstract = "Zinc oxide nanostructures are widely used as a platform for biosensors. Extremely sensitive gas sensors made of ZnO are not only cheap and easy to manufacture, but also diverse in terms of types of nanostructures. In this work zinc oxide nanstructures were prepared via on-stage plasma-chemical interaction of zinc vapors with oxygen. Argon of high purity was also used as a career gas for zinc transport to the discharge zone and as a plasma feed gas. The process was carried out at the low pressure (0.1 Torr) in inductively coupled nonequilibrium RF (40.68 MHz) plasma discharge. Optical emission diagnostic has been performed to characterize the main parameters of the plasma-chemical process. The AFM technique was implemented for specifications of the materials surface parameters. ",

keywords = "Biosensors, Nanostructures, Plasma deposition, Zinc oxide",

author = "Leonid Mochalov and Alexander Logunov and Tatiana Sazanova and Artem Kulikov and Edik Rafailov and Sergey Zelentsov and Vladimir Vorotyntsev",

note = "Funding Information: The reported study was funded by RFBR according to the research project ʋ 20-08-00237 “Development of the scientific foundations of a universal plasma-chemical method for the synthesis of zinc oxide nanostructures to create luminescent devices, solar cells, gas and biosensors of a new generation”.; 22nd International Conference on Transparent Optical Networks, ICTON 2020 ; Conference date: 19-07-2020 Through 23-07-2020",

year = "2020",

month = sep,

day = "22",

doi = "10.1109/ICTON51198.2020.9203466",

language = "English",

series = "International Conference on Transparent Optical Networks",

publisher = "IEEE",

booktitle = "2020 22nd International Conference on Transparent Optical Networks, ICTON 2020",

address = "United States",

}

Mochalov, L, Logunov, A, Sazanova, T, Kulikov, A, Rafailov, E, Zelentsov, S & Vorotyntsev, V 2020, Zinc oxide nanostructured materials prepared by PECVD as a platform for biosensors. in 2020 22nd International Conference on Transparent Optical Networks, ICTON 2020., 9203466, International Conference on Transparent Optical Networks, vol. 2020-July, IEEE, 22nd International Conference on Transparent Optical Networks, ICTON 2020, Bari, Italy, 19/07/20. https://doi.org/10.1109/ICTON51198.2020.9203466

Zinc oxide nanostructured materials prepared by PECVD as a platform for biosensors. / Mochalov, Leonid; Logunov, Alexander; Sazanova, Tatiana et al.
2020 22nd International Conference on Transparent Optical Networks, ICTON 2020. IEEE, 2020. 9203466 (International Conference on Transparent Optical Networks; Vol. 2020-July).

Research output: Chapter in Book/Published conference output › Conference publication

TY - GEN

T1 - Zinc oxide nanostructured materials prepared by PECVD as a platform for biosensors

AU - Mochalov, Leonid

AU - Logunov, Alexander

AU - Sazanova, Tatiana

AU - Kulikov, Artem

AU - Rafailov, Edik

AU - Zelentsov, Sergey

AU - Vorotyntsev, Vladimir

N1 - Funding Information: The reported study was funded by RFBR according to the research project ʋ 20-08-00237 “Development of the scientific foundations of a universal plasma-chemical method for the synthesis of zinc oxide nanostructures to create luminescent devices, solar cells, gas and biosensors of a new generation”.

PY - 2020/9/22

Y1 - 2020/9/22

N2 - Zinc oxide nanostructures are widely used as a platform for biosensors. Extremely sensitive gas sensors made of ZnO are not only cheap and easy to manufacture, but also diverse in terms of types of nanostructures. In this work zinc oxide nanstructures were prepared via on-stage plasma-chemical interaction of zinc vapors with oxygen. Argon of high purity was also used as a career gas for zinc transport to the discharge zone and as a plasma feed gas. The process was carried out at the low pressure (0.1 Torr) in inductively coupled nonequilibrium RF (40.68 MHz) plasma discharge. Optical emission diagnostic has been performed to characterize the main parameters of the plasma-chemical process. The AFM technique was implemented for specifications of the materials surface parameters.

AB - Zinc oxide nanostructures are widely used as a platform for biosensors. Extremely sensitive gas sensors made of ZnO are not only cheap and easy to manufacture, but also diverse in terms of types of nanostructures. In this work zinc oxide nanstructures were prepared via on-stage plasma-chemical interaction of zinc vapors with oxygen. Argon of high purity was also used as a career gas for zinc transport to the discharge zone and as a plasma feed gas. The process was carried out at the low pressure (0.1 Torr) in inductively coupled nonequilibrium RF (40.68 MHz) plasma discharge. Optical emission diagnostic has been performed to characterize the main parameters of the plasma-chemical process. The AFM technique was implemented for specifications of the materials surface parameters.

KW - Biosensors

KW - Nanostructures

KW - Plasma deposition

KW - Zinc oxide

UR - http://www.scopus.com/inward/record.url?scp=85092469499&partnerID=8YFLogxK

UR - https://ieeexplore.ieee.org/document/9203466

U2 - 10.1109/ICTON51198.2020.9203466

DO - 10.1109/ICTON51198.2020.9203466

M3 - Conference publication

AN - SCOPUS:85092469499

T3 - International Conference on Transparent Optical Networks

BT - 2020 22nd International Conference on Transparent Optical Networks, ICTON 2020

PB - IEEE

T2 - 22nd International Conference on Transparent Optical Networks, ICTON 2020

Y2 - 19 July 2020 through 23 July 2020

ER -

Zinc oxide nanostructured materials prepared by PECVD as a platform for biosensors

Abstract

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Bibliographical note

Keywords

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