Zinc oxide nanostructured materials prepared by PECVD as a platform for biosensors

Leonid Mochalov*, Alexander Logunov, Tatiana Sazanova, Artem Kulikov, Edik Rafailov, Sergey Zelentsov, Vladimir Vorotyntsev

*Corresponding author for this work

Research output: Chapter in Book/Published conference outputConference publication

Abstract

Zinc oxide nanostructures are widely used as a platform for biosensors. Extremely sensitive gas sensors made of ZnO are not only cheap and easy to manufacture, but also diverse in terms of types of nanostructures. In this work zinc oxide nanstructures were prepared via on-stage plasma-chemical interaction of zinc vapors with oxygen. Argon of high purity was also used as a career gas for zinc transport to the discharge zone and as a plasma feed gas. The process was carried out at the low pressure (0.1 Torr) in inductively coupled nonequilibrium RF (40.68 MHz) plasma discharge. Optical emission diagnostic has been performed to characterize the main parameters of the plasma-chemical process. The AFM technique was implemented for specifications of the materials surface parameters.

Original languageEnglish
Title of host publication2020 22nd International Conference on Transparent Optical Networks, ICTON 2020
PublisherIEEE
ISBN (Electronic)9781728184234
DOIs
Publication statusPublished - 22 Sep 2020
Event22nd International Conference on Transparent Optical Networks, ICTON 2020 - Bari, Italy
Duration: 19 Jul 202023 Jul 2020

Publication series

NameInternational Conference on Transparent Optical Networks
Volume2020-July
ISSN (Electronic)2162-7339

Conference

Conference22nd International Conference on Transparent Optical Networks, ICTON 2020
CountryItaly
CityBari
Period19/07/2023/07/20

Bibliographical note

Funding Information:
The reported study was funded by RFBR according to the research project ʋ 20-08-00237 “Development of the scientific foundations of a universal plasma-chemical method for the synthesis of zinc oxide nanostructures to create luminescent devices, solar cells, gas and biosensors of a new generation”.

Keywords

  • Biosensors
  • Nanostructures
  • Plasma deposition
  • Zinc oxide

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