Chemistry of plasmas used in the fabrication of integrated circuits

  • Michael Simpson

Student thesis: Doctoral ThesisDoctor of Philosophy

Abstract

Date of Award1982
Original languageEnglish

Keywords

  • Chemistry
  • plasmas
  • fabrication
  • integrated circuits

Cite this

Chemistry of plasmas used in the fabrication of integrated circuits
Simpson, M. (Author). 1982

Student thesis: Doctoral ThesisDoctor of Philosophy