TY - JOUR
T1 - Effect of dopants on the fracture toughness of silicon
AU - Swadener, J.G.
AU - Nastasi, M.
N1 - Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2002/9
Y1 - 2002/9
N2 - Fracture experiments were conducted on p-type and n-type Si in the presence and absence of hydrogen. It was found that fracture toughness is slightly less than the fracture toughness of n-type silicon. Annealing silicon in an Ar/H atmosphere gave a hydrogen concentration of less than 0.1 ppm, which did not have any measurable effect on fracture toughness. Likewise, the exposure of pre-cracked specimens to H did not cause any measurable change in fracture toughness.
AB - Fracture experiments were conducted on p-type and n-type Si in the presence and absence of hydrogen. It was found that fracture toughness is slightly less than the fracture toughness of n-type silicon. Annealing silicon in an Ar/H atmosphere gave a hydrogen concentration of less than 0.1 ppm, which did not have any measurable effect on fracture toughness. Likewise, the exposure of pre-cracked specimens to H did not cause any measurable change in fracture toughness.
UR - http://www.scopus.com/inward/record.url?scp=0036748893&partnerID=8YFLogxK
UR - http://link.springer.com/article/10.1023%2FA%3A1019772717743
U2 - 10.1023/A:1019772717743
DO - 10.1023/A:1019772717743
M3 - Article
AN - SCOPUS:0036748893
SN - 0261-8028
VL - 21
SP - 1363
EP - 1365
JO - Journal of Materials Science letters
JF - Journal of Materials Science letters
IS - 17
ER -