Femtosecond laser-induced microstructures on diamond for microfluidic sensing device applications

Shi Su; Jiangling Li; Graham Lee; Kate Sugden; David Webb; Haitao Ye

doi:10.1063/1.4811170

Femtosecond laser-induced microstructures on diamond for microfluidic sensing device applications

Shi Su, Jiangling Li, Graham Lee, Kate Sugden, David Webb, Haitao Ye

Aston Institute of Photonic Technologies (AiPT)

Research output: Contribution to journal › Article › peer-review

Abstract

This paper reported a three-dimensional microfluidic channel structure, which was fabricated by Yb:YAG 1026?nm femtosecond laser irradiation on a single-crystalline diamond substrate. The femtosecond laser irradiation energy level was optimized at 100?kHz repetition rate with a sub-500 femtosecond pulse duration. The morphology and topography of the microfluidic channel were characterized by a scanning electron microscope and an atomic force microscope. Raman spectroscopy indicated that the irradiated area was covered by graphitic materials. By comparing the cross-sectional profiles before/after removing the graphitic materials, it could be deduced that the microfluidic channel has an average depth of ~410?nm with periodical ripples perpendicular to the irradiation direction. This work proves the feasibility of using ultra-fast laser inscription technology to fabricate microfluidic channels on biocompatible diamond substrates, which offers a great potential for biomedical sensing applications.

Original language	English
Article number	231913
Pages (from-to)	231913
Number of pages	5
Journal	Applied Physics Letters
Volume	102
Issue number	23
DOIs	https://doi.org/10.1063/1.4811170
Publication status	Published - 2013

Bibliographical note

Copyright 2013 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
The following article appeared in Su, S., Li, J., Lee, G., Sugden, K., Webb, D., & Ye, H. (2013). Femtosecond laser-induced microstructures on diamond for microfluidic sensing devices applications. Applied physics letters, 102(23), [231913] and may be found at http://link.aip.org/link/?apl/102/231913

The authors want to acknowledge the funding for this study provided by the Engineering and Physical Sciences Research Council (EPSRC: EP/H034269/1).

Keywords

atomic force microscopy
surface topography
surface morphology
scanning electron microscopy
Raman spectra
microfluidics
microfabrication
laser beam effects
high-speed optical techniques
crystal microstructure
diamond

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10.1063/1.4811170

Femtosecond laser induced microstructures
Copyright 2013 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Su, S., Li, J., Lee, G., Sugden, K., Webb, D., & Ye, H. (2013). Femtosecond laser-induced microstructures on diamond for microfluidic sensing devices applications. Applied physics letters, 102(23), [231913] and may be found at http://link.aip.org/link/?apl/102/231913
Final published version, 1.42 MB

Cite this

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title = "Femtosecond laser-induced microstructures on diamond for microfluidic sensing device applications",

abstract = "This paper reported a three-dimensional microfluidic channel structure, which was fabricated by Yb:YAG 1026?nm femtosecond laser irradiation on a single-crystalline diamond substrate. The femtosecond laser irradiation energy level was optimized at 100?kHz repetition rate with a sub-500 femtosecond pulse duration. The morphology and topography of the microfluidic channel were characterized by a scanning electron microscope and an atomic force microscope. Raman spectroscopy indicated that the irradiated area was covered by graphitic materials. By comparing the cross-sectional profiles before/after removing the graphitic materials, it could be deduced that the microfluidic channel has an average depth of ~410?nm with periodical ripples perpendicular to the irradiation direction. This work proves the feasibility of using ultra-fast laser inscription technology to fabricate microfluidic channels on biocompatible diamond substrates, which offers a great potential for biomedical sensing applications.",

keywords = "atomic force microscopy, surface topography, surface morphology, scanning electron microscopy, Raman spectra, microfluidics, microfabrication, laser beam effects, high-speed optical techniques, crystal microstructure, diamond",

author = "Shi Su and Jiangling Li and Graham Lee and Kate Sugden and David Webb and Haitao Ye",

note = "Copyright 2013 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Su, S., Li, J., Lee, G., Sugden, K., Webb, D., & Ye, H. (2013). Femtosecond laser-induced microstructures on diamond for microfluidic sensing devices applications. Applied physics letters, 102(23), [231913] and may be found at http://link.aip.org/link/?apl/102/231913 The authors want to acknowledge the funding for this study provided by the Engineering and Physical Sciences Research Council (EPSRC: EP/H034269/1).",

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N1 - Copyright 2013 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Su, S., Li, J., Lee, G., Sugden, K., Webb, D., & Ye, H. (2013). Femtosecond laser-induced microstructures on diamond for microfluidic sensing devices applications. Applied physics letters, 102(23), [231913] and may be found at http://link.aip.org/link/?apl/102/231913 The authors want to acknowledge the funding for this study provided by the Engineering and Physical Sciences Research Council (EPSRC: EP/H034269/1).

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N2 - This paper reported a three-dimensional microfluidic channel structure, which was fabricated by Yb:YAG 1026?nm femtosecond laser irradiation on a single-crystalline diamond substrate. The femtosecond laser irradiation energy level was optimized at 100?kHz repetition rate with a sub-500 femtosecond pulse duration. The morphology and topography of the microfluidic channel were characterized by a scanning electron microscope and an atomic force microscope. Raman spectroscopy indicated that the irradiated area was covered by graphitic materials. By comparing the cross-sectional profiles before/after removing the graphitic materials, it could be deduced that the microfluidic channel has an average depth of ~410?nm with periodical ripples perpendicular to the irradiation direction. This work proves the feasibility of using ultra-fast laser inscription technology to fabricate microfluidic channels on biocompatible diamond substrates, which offers a great potential for biomedical sensing applications.

AB - This paper reported a three-dimensional microfluidic channel structure, which was fabricated by Yb:YAG 1026?nm femtosecond laser irradiation on a single-crystalline diamond substrate. The femtosecond laser irradiation energy level was optimized at 100?kHz repetition rate with a sub-500 femtosecond pulse duration. The morphology and topography of the microfluidic channel were characterized by a scanning electron microscope and an atomic force microscope. Raman spectroscopy indicated that the irradiated area was covered by graphitic materials. By comparing the cross-sectional profiles before/after removing the graphitic materials, it could be deduced that the microfluidic channel has an average depth of ~410?nm with periodical ripples perpendicular to the irradiation direction. This work proves the feasibility of using ultra-fast laser inscription technology to fabricate microfluidic channels on biocompatible diamond substrates, which offers a great potential for biomedical sensing applications.

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KW - high-speed optical techniques

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Femtosecond laser-induced microstructures on diamond for microfluidic sensing device applications

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Keywords

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