High stability multiplexed fibre interferometer and its application on absolute displacement measurement and on-line surface metrology

Dejiao Lin; Xiangqian Jiang; Fang Xie; Wei Zhang; Lin Zhang; Ian Bennion

doi:10.1364/OPEX.12.005729

High stability multiplexed fibre interferometer and its application on absolute displacement measurement and on-line surface metrology

Dejiao Lin^*, Xiangqian Jiang, Fang Xie, Wei Zhang, Lin Zhang, Ian Bennion

^*Corresponding author for this work

Aston Institute of Photonic Technologies (AiPT)

Research output: Contribution to journal › Article › peer-review

Abstract

We propose a self-reference multiplexed fibre interferometer (MFI) by using a tunable laser and fibre Bragg grating (FBG). The optical measurement system multiplexes two Michelson fibre interferometers with shared optical path in the main part of optical system. One fibre optic interferometer is used as a reference interferometer to monitor and control the high accuracy of the measurement system under environmental perturbations. The other is used as a measurement interferometer to obtain information from the target. An active phase tracking homodyne (APTH) technique is applied for signal processing to achieve high resolution. MFI can be utilised for high precision absolute displacement measurement with different combination of wavelengths from the tuneable laser. By means of Wavelength-Division-Multiplexing (WDM) technique, MFI is also capable of realising on-line surface measurement, in which traditional stylus scanning is replaced by spatial light-wave scanning so as to greatly improve the measurement speed and robustness. © 2004 Optical Society of America.

Original language	English
Pages (from-to)	5729-5734
Number of pages	6
Journal	Optics Express
Volume	12
Issue number	23
DOIs	https://doi.org/10.1364/OPEX.12.005729
Publication status	Published - 15 Nov 2004

Bibliographical note

© 2004 OSA
This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/OPEX.12.005729. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

Keywords

interferometry
fiber optics
phase measurement
surface measurements

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10.1364/OPEX.12.005729

High stability multiplexed fiber interferometer and its application on absolute displacement measurement and on-line surface metrology
© 2004 OSA This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/OPEX.12.005729. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
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Cite this

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title = "High stability multiplexed fibre interferometer and its application on absolute displacement measurement and on-line surface metrology",

abstract = "We propose a self-reference multiplexed fibre interferometer (MFI) by using a tunable laser and fibre Bragg grating (FBG). The optical measurement system multiplexes two Michelson fibre interferometers with shared optical path in the main part of optical system. One fibre optic interferometer is used as a reference interferometer to monitor and control the high accuracy of the measurement system under environmental perturbations. The other is used as a measurement interferometer to obtain information from the target. An active phase tracking homodyne (APTH) technique is applied for signal processing to achieve high resolution. MFI can be utilised for high precision absolute displacement measurement with different combination of wavelengths from the tuneable laser. By means of Wavelength-Division-Multiplexing (WDM) technique, MFI is also capable of realising on-line surface measurement, in which traditional stylus scanning is replaced by spatial light-wave scanning so as to greatly improve the measurement speed and robustness. {\textcopyright} 2004 Optical Society of America.",

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AU - Bennion, Ian

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N2 - We propose a self-reference multiplexed fibre interferometer (MFI) by using a tunable laser and fibre Bragg grating (FBG). The optical measurement system multiplexes two Michelson fibre interferometers with shared optical path in the main part of optical system. One fibre optic interferometer is used as a reference interferometer to monitor and control the high accuracy of the measurement system under environmental perturbations. The other is used as a measurement interferometer to obtain information from the target. An active phase tracking homodyne (APTH) technique is applied for signal processing to achieve high resolution. MFI can be utilised for high precision absolute displacement measurement with different combination of wavelengths from the tuneable laser. By means of Wavelength-Division-Multiplexing (WDM) technique, MFI is also capable of realising on-line surface measurement, in which traditional stylus scanning is replaced by spatial light-wave scanning so as to greatly improve the measurement speed and robustness. © 2004 Optical Society of America.

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High stability multiplexed fibre interferometer and its application on absolute displacement measurement and on-line surface metrology

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