Analysis of femtosecond laser surface patterning on bulk single-crystalline diamond

Graham C.B. Lee, Shi Su, Jiangling Li, Kate Sugden, Nima Roohpour, Haixue Yan, Haitao Ye*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


Preliminary work is reported on 2-D and 3-D microstructures written directly with a Yb:YAG 1026 nm femtosecond (fs) laser on bulk chemical vapour deposition (CVD) single-crystalline diamond. Smooth graphitic lines and other structures were written on the surface of a CVD diamond sample with a thickness of 0.7mm under low laser fluences. This capability opens up the opportunity for making electronic devices and micro-electromechanical structures on diamond substrates. The fabrication process was optimised through testing a range of laser energies at a 100 kHz repetition rate with sub-500fs pulses. These graphitic lines and structures have been characterised using optical microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and atomic force microscopy. Using these analysis techniques, the formation of sp2 and sp3 bonds is explored and the ratio between sp2 and sp3 bonds after fs laser patterning is quantified. We present the early findings from this study and characterise the relationship between the graphitic line formation and the different fs laser exposure conditions.

Original languageEnglish
Pages (from-to)662-672
Number of pages11
JournalJournal of Experimental Nanoscience
Issue number6
Publication statusPublished - Dec 2012

Bibliographical note

Funding: EPSRC: EP/H034269/1


  • femtosecond laser patterning
  • graphitic
  • MEMS
  • microstructures
  • single-crystalline diamond


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