Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 855-858 |
| Number of pages | 4 |
| Journal | Procedia Chemistry |
| Volume | 1 |
| Issue number | 1 |
| Early online date | 31 Aug 2009 |
| DOIs | |
| Publication status | Published - Sep 2009 |
| Event | Eurosensors XXIII - Lausanne, Switzerland Duration: 6 Sep 2009 → 9 Sep 2009 |
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Bibliographical note
© 2009 Published by Elsevier B.V.Open access under CC BY-NC-ND license.
Keywords
- nonlinear
- electrostatic
- impact oscillator
- autonomous
Cite this
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Design and fabrication of a nonlinear micro impact oscillator. / Wei, Xueyong; Anthony, Carl; Lowe, David; Ward, Mark.
In: Procedia Chemistry, Vol. 1, No. 1, 09.2009, p. 855-858.Research output: Contribution to journal › Article
TY - JOUR
T1 - Design and fabrication of a nonlinear micro impact oscillator
AU - Wei, Xueyong
AU - Anthony, Carl
AU - Lowe, David
AU - Ward, Mark
N1 - © 2009 Published by Elsevier B.V. Open access under CC BY-NC-ND license.
PY - 2009/9
Y1 - 2009/9
N2 - In this paper we describe the design and fabrication of a mechanical autonomous impact oscillator with a MEMS resonator as the frequency control element. The design has been developed with scalability to large 2-D arrays of coupled oscillators in mind. The dynamic behaviour of the impact oscillator was numerically studied and it was found that the geometry nonlinearity has an effect on the static pull-in voltage and equilibrium position. The external driving power can alter the frequency of the impact oscillator. The autonomous nature of the oscillator simplifies the complexity of the drive circuitry and is essential for large 2-D arrays.
AB - In this paper we describe the design and fabrication of a mechanical autonomous impact oscillator with a MEMS resonator as the frequency control element. The design has been developed with scalability to large 2-D arrays of coupled oscillators in mind. The dynamic behaviour of the impact oscillator was numerically studied and it was found that the geometry nonlinearity has an effect on the static pull-in voltage and equilibrium position. The external driving power can alter the frequency of the impact oscillator. The autonomous nature of the oscillator simplifies the complexity of the drive circuitry and is essential for large 2-D arrays.
KW - nonlinear
KW - electrostatic
KW - impact oscillator
KW - autonomous
UR - http://www.scopus.com/inward/record.url?scp=71549115135&partnerID=8YFLogxK
U2 - 10.1016/j.proche.2009.07.213
DO - 10.1016/j.proche.2009.07.213
M3 - Article
VL - 1
SP - 855
EP - 858
JO - Procedia Chemistry
JF - Procedia Chemistry
SN - 1876-6196
IS - 1
ER -