Abstract
In this paper we describe the design and fabrication of a mechanical autonomous impact oscillator with a MEMS resonator as the frequency control element. The design has been developed with scalability to large 2-D arrays of coupled oscillators in mind. The dynamic behaviour of the impact oscillator was numerically studied and it was found that the geometry nonlinearity has an effect on the static pull-in voltage and equilibrium position. The external driving power can alter the frequency of the impact oscillator. The autonomous nature of the oscillator simplifies the complexity of the drive circuitry and is essential for large 2-D arrays.
| Original language | English |
|---|---|
| Pages (from-to) | 855-858 |
| Number of pages | 4 |
| Journal | Procedia Chemistry |
| Volume | 1 |
| Issue number | 1 |
| Early online date | 31 Aug 2009 |
| DOIs | |
| Publication status | Published - Sep 2009 |
| Event | Eurosensors XXIII - Lausanne, Switzerland Duration: 6 Sep 2009 → 9 Sep 2009 |
Bibliographical note
© 2009 Published by Elsevier B.V.Open access under CC BY-NC-ND license.
Keywords
- nonlinear
- electrostatic
- impact oscillator
- autonomous
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Cite this
Wei, X., Anthony, C., Lowe, D., & Ward, M. (2009). Design and fabrication of a nonlinear micro impact oscillator. Procedia Chemistry, 1(1), 855-858. https://doi.org/10.1016/j.proche.2009.07.213