Design and fabrication of a nonlinear micro impact oscillator

Xueyong Wei; Carl Anthony; David Lowe; Mark Ward

doi:10.1016/j.proche.2009.07.213

Design and fabrication of a nonlinear micro impact oscillator

Xueyong Wei, Carl Anthony, David Lowe, Mark Ward

Research output: Contribution to journal › Article › peer-review

Abstract

In this paper we describe the design and fabrication of a mechanical autonomous impact oscillator with a MEMS resonator as the frequency control element. The design has been developed with scalability to large 2-D arrays of coupled oscillators in mind. The dynamic behaviour of the impact oscillator was numerically studied and it was found that the geometry nonlinearity has an effect on the static pull-in voltage and equilibrium position. The external driving power can alter the frequency of the impact oscillator. The autonomous nature of the oscillator simplifies the complexity of the drive circuitry and is essential for large 2-D arrays.

Original language	English
Pages (from-to)	855-858
Number of pages	4
Journal	Procedia Chemistry
Volume	1
Issue number	1
Early online date	31 Aug 2009
DOIs	https://doi.org/10.1016/j.proche.2009.07.213
Publication status	Published - Sept 2009
Event	Eurosensors XXIII - Lausanne, Switzerland Duration: 6 Sept 2009 → 9 Sept 2009

Bibliographical note

© 2009 Published by Elsevier B.V.
Open access under CC BY-NC-ND license.

Keywords

nonlinear
electrostatic
impact oscillator
autonomous

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10.1016/j.proche.2009.07.213Licence: CC BY-NC-ND 3.0

Design and Fabrication of a Nonlinear Micro Impact Oscillator
© 2009 Published by Elsevier B.V. Open access under CC BY-NC-ND license.
Final published version, 293 KBLicence: CC BY-NC-ND 3.0

Cite this

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abstract = "In this paper we describe the design and fabrication of a mechanical autonomous impact oscillator with a MEMS resonator as the frequency control element. The design has been developed with scalability to large 2-D arrays of coupled oscillators in mind. The dynamic behaviour of the impact oscillator was numerically studied and it was found that the geometry nonlinearity has an effect on the static pull-in voltage and equilibrium position. The external driving power can alter the frequency of the impact oscillator. The autonomous nature of the oscillator simplifies the complexity of the drive circuitry and is essential for large 2-D arrays.",

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AU - Ward, Mark

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AB - In this paper we describe the design and fabrication of a mechanical autonomous impact oscillator with a MEMS resonator as the frequency control element. The design has been developed with scalability to large 2-D arrays of coupled oscillators in mind. The dynamic behaviour of the impact oscillator was numerically studied and it was found that the geometry nonlinearity has an effect on the static pull-in voltage and equilibrium position. The external driving power can alter the frequency of the impact oscillator. The autonomous nature of the oscillator simplifies the complexity of the drive circuitry and is essential for large 2-D arrays.

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KW - autonomous

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Y2 - 6 September 2009 through 9 September 2009

ER -

Design and fabrication of a nonlinear micro impact oscillator

Abstract

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Keywords

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