In this paper we describe the design and fabrication of a mechanical autonomous impact oscillator with a MEMS resonator as the frequency control element. The design has been developed with scalability to large 2-D arrays of coupled oscillators in mind. The dynamic behaviour of the impact oscillator was numerically studied and it was found that the geometry nonlinearity has an effect on the static pull-in voltage and equilibrium position. The external driving power can alter the frequency of the impact oscillator. The autonomous nature of the oscillator simplifies the complexity of the drive circuitry and is essential for large 2-D arrays.
|Number of pages||4|
|Early online date||31 Aug 2009|
|Publication status||Published - Sept 2009|
|Event||Eurosensors XXIII - Lausanne, Switzerland|
Duration: 6 Sept 2009 → 9 Sept 2009
Bibliographical note© 2009 Published by Elsevier B.V.
Open access under CC BY-NC-ND license.
- impact oscillator