Design and fabrication of a nonlinear micro impact oscillator

Xueyong Wei, Carl Anthony, David Lowe, Mark Ward

Research output: Contribution to journalArticlepeer-review


In this paper we describe the design and fabrication of a mechanical autonomous impact oscillator with a MEMS resonator as the frequency control element. The design has been developed with scalability to large 2-D arrays of coupled oscillators in mind. The dynamic behaviour of the impact oscillator was numerically studied and it was found that the geometry nonlinearity has an effect on the static pull-in voltage and equilibrium position. The external driving power can alter the frequency of the impact oscillator. The autonomous nature of the oscillator simplifies the complexity of the drive circuitry and is essential for large 2-D arrays.
Original languageEnglish
Pages (from-to)855-858
Number of pages4
JournalProcedia Chemistry
Issue number1
Early online date31 Aug 2009
Publication statusPublished - Sep 2009
EventEurosensors XXIII - Lausanne, Switzerland
Duration: 6 Sep 20099 Sep 2009

Bibliographical note

© 2009 Published by Elsevier B.V.
Open access under CC BY-NC-ND license.


  • nonlinear
  • electrostatic
  • impact oscillator
  • autonomous


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