Abstract
A novel form of low coherence interferometric sensor is described. The channelled spectrum produced by illuminating a sensing interferometer with a broadband source is analysed directly using a CCD array. The system currently provides unambiguous measurement over a range of 1.5 mm with an accuracy of better than 6 µm.
Original language | English |
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Pages (from-to) | 896-897 |
Number of pages | 2 |
Journal | Electronics letters |
Volume | 29 |
Issue number | 10 |
DOIs | |
Publication status | Published - 13 May 1993 |
Keywords
- laser diode source
- channelled spectrum
- linear CCD array
- low coherence interferometric sensor
- broadband source
- 1.5 mm