Displacement sensor using channelled spectrum dispersed on a linear CCD array

S. Taplin, A.G. Podleanu, David J. Webb, David A. Jackson

Research output: Contribution to journalArticlepeer-review

Abstract

A novel form of low coherence interferometric sensor is described. The channelled spectrum produced by illuminating a sensing interferometer with a broadband source is analysed directly using a CCD array. The system currently provides unambiguous measurement over a range of 1.5 mm with an accuracy of better than 6 µm.
Original languageEnglish
Pages (from-to)896-897
Number of pages2
JournalElectronics letters
Volume29
Issue number10
DOIs
Publication statusPublished - 13 May 1993

Keywords

  • laser diode source
  • channelled spectrum
  • linear CCD array
  • low coherence interferometric sensor
  • broadband source
  • 1.5 mm

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