Imprinted hydrogels for tunable hemispherical microlenses

Vincent Reboud, Isabel Obieta, Leire Bilbao, Virginia Sáez-Martínez, Mickael Brun, Fabien Laulagnet, Stefan Landis

Research output: Contribution to journalArticle

Abstract

We report on the development of an ultraviolet curable hydrogel, based on combinations of poly(ethylene glycol) dimethacrylate (PEGMA), acrylic acid (AA) and N-Isopropylacrylamide (NIPPAm) for imprint lithography processes. The hydrogel was successfully imprinted to form dynamic microlens arrays. The response rate of the microlenses by volume change to water absorption was studied optically showing tunable focalisation of the light. Important optical refractive index change was measured between the dry and wet state of the microlenses. Our work suggests the use of this newly developed printable hydrogel for various imprinted components for sensing and imaging systems.
Original languageEnglish
Pages (from-to)189-192
Number of pages4
JournalMicroelectronic Engineering
Volume111
Early online date6 Apr 2013
DOIs
Publication statusPublished - Nov 2013

Keywords

  • hydrogel
  • microlens
  • imprint lithography
  • micro-optics

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  • Cite this

    Reboud, V., Obieta, I., Bilbao, L., Sáez-Martínez, V., Brun, M., Laulagnet, F., & Landis, S. (2013). Imprinted hydrogels for tunable hemispherical microlenses. Microelectronic Engineering, 111, 189-192. https://doi.org/10.1016/j.mee.2013.03.150