With an increasing use of emerging patterning technologies such as UV-NIL in biotechnological applications there is at the same time a raising demand for new material for such applications. Here we present a PEG based precursor mixed with a photoinitiator to make it UV sensitive as a new material aimed at biotechnological applications. Using HSQ patterned quartz stamps we observed excellent pattern replication indicating good flow properties of the resist. We were able to obtain imprints with <20 nm residual layer. The PEG based resist has hydrogel properties and it swelling in water was observed by AFM.
- flash imprint
Gaston, A., Khokhar, A. Z., Bilbao, L., Sáez-Martínez, V., Corres, A., Obieta, I., & Gadegaard, N. (2010). Nanopatterned UV curable hydrogels for biomedical applications. Microelectronic Engineering, 87(5-8), 1057-1061. https://doi.org/10.1016/j.mee.2009.11.089