Abstract
With an increasing use of emerging patterning technologies such as UV-NIL in biotechnological applications there is at the same time a raising demand for new material for such applications. Here we present a PEG based precursor mixed with a photoinitiator to make it UV sensitive as a new material aimed at biotechnological applications. Using HSQ patterned quartz stamps we observed excellent pattern replication indicating good flow properties of the resist. We were able to obtain imprints with <20 nm residual layer. The PEG based resist has hydrogel properties and it swelling in water was observed by AFM.
Original language | English |
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Pages (from-to) | 1057-1061 |
Number of pages | 5 |
Journal | Microelectronic Engineering |
Volume | 87 |
Issue number | 5-8 |
DOIs | |
Publication status | Published - May 2010 |
Keywords
- UV-NIL
- flash imprint
- HSQ
- PEG