Vertical multiple-slot waveguide ring resonators in silicon nitride

Laurent Vivien*, Delphine Marris-Morini, Amadeu Griol, Kristinn B. Gylfason, Daniel Hill, Jesús Álvarez, Hans Sohlström, Juan Hurtado, David Bouville, Eric Cassan

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 μm, 90 μm and 110 μm) have been carried out for TE and TM polarizations at the wavelength of 1.3 μm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.

Original languageEnglish
Pages (from-to)17237-17242
Number of pages6
JournalOptics Express
Issue number22
Publication statusPublished - 27 Oct 2008

Bibliographical note

©2008 Optical Society of America. This is an open access article according to the OSA Publishing guidelines


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