TY - JOUR
T1 - Vertical multiple-slot waveguide ring resonators in silicon nitride
AU - Vivien, Laurent
AU - Marris-Morini, Delphine
AU - Griol, Amadeu
AU - Gylfason, Kristinn B.
AU - Hill, Daniel
AU - Álvarez, Jesús
AU - Sohlström, Hans
AU - Hurtado, Juan
AU - Bouville, David
AU - Cassan, Eric
N1 - ©2008 Optical Society of America. This is an open access article according to the OSA Publishing guidelines https://www.osapublishing.org/submit/review/open-access-policy-statement.cfm
PY - 2008/10/27
Y1 - 2008/10/27
N2 - This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 μm, 90 μm and 110 μm) have been carried out for TE and TM polarizations at the wavelength of 1.3 μm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.
AB - This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 μm, 90 μm and 110 μm) have been carried out for TE and TM polarizations at the wavelength of 1.3 μm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.
UR - http://www.scopus.com/inward/record.url?scp=55349096822&partnerID=8YFLogxK
UR - https://www.osapublishing.org/oe/abstract.cfm?uri=oe-16-22-17237
U2 - 10.1364/OE.16.017237
DO - 10.1364/OE.16.017237
M3 - Article
AN - SCOPUS:55349096822
SN - 1094-4087
VL - 16
SP - 17237
EP - 17242
JO - Optics Express
JF - Optics Express
IS - 22
ER -